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Multiple stress concentrated type MEMS bionic hydrophone

A centralized, hydrophone technology, applied to instruments, measuring devices, and measuring ultrasonic/sonic/infrasonic waves, etc., can solve problems such as starboard and starboard ambiguity, sensitivity and frequency response bandwidth are not ideal, so as to overcome inconsistency and broaden the effective The effect of frequency range, ease of installation and testing

Inactive Publication Date: 2016-06-29
ZHONGBEI UNIV
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

[0003] The purpose of the present invention is to solve the problems that the existing MEMS vector hydrophone can only measure the sound field vector information, the sensitivity and the frequency response bandwidth are not ideal, and the left and right sides are blurred, and provide a kind of multiple stress concentration type MEMS bionic hydrophone

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  • Multiple stress concentrated type MEMS bionic hydrophone
  • Multiple stress concentrated type MEMS bionic hydrophone
  • Multiple stress concentrated type MEMS bionic hydrophone

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Embodiment Construction

[0041] The present invention will be further described below in conjunction with accompanying drawing:

[0042] Such as Figure 1 to Figure 4 Shown, a kind of multiple stress concentration type MEMS biomimetic hydrophone, comprises circular bottom layer silicon 1, is oxidized with oxide layer 2 on bottom layer silicon 1, is bonded with circular top layer silicon 3 on oxide layer 2; Top layer silicon The middle part of 3 is arranged with four groups of four-beam cilia type acoustic-electric transduction structures 4 in the form of rows and columns, and four groups of four-beam cilia-type acoustic-electric transduction structures 4 are symmetrically arranged around the center of the top silicon 3, wherein the four-beam cilia The acoustic-electric transducing structure 4 includes a square window 4-4 set on the top layer of silicon 3, the center of the square window 4-4 is provided with a square central connector 4-3, and the four sides of the central connector 4-3 pass through fo...

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Abstract

The invention relates to a multiple stress concentrated type MEMS bionic hydrophone, and solves the problems including that a present MEMS bionic hydrophone can only measure vector information of a sound field, is relatively low in flexibility and frequency response bandwidth and is fuzzy in port and starboard. The hydrophone comprises a bottom silicon layer, an oxide layer and a top silicon layer, four tetra-beam cilium type acoustoelectric transduction structures are distributed in the top silicon layer uniformly, the bottom of each tetra-beam cilium type acoustoelectric transduction structure includes a cavity, each of the two ends of each cantilever beam is provided with a settling tank and an internally shrunk gap, the four cavities are distributed uniformly on the oxide layer, the top silicon layer is sputtered with upper electrodes at positions facing the cavities respectively, the bottom silicon layer is sputtered with lower electrodes at positions facing the cavities respectively, and each upper electrode is surrounded by four oil filling holes which are distributed in the top silicon layer uniformly. The hydrophone of the invention is simple in structure, greatly widens the effective frequency band range, provides convenience for installation and test by monolithic integration, improves the installation precision, uses a single sensor to realize a sensor array in small size, and overcomes the problem that different hydrophones in a traditional array are inconsistent.

Description

technical field [0001] The invention relates to the technical field of MEMS bionic hydrophones, in particular to a multiple stress concentration type MEMS bionic hydrophone. Background technique [0002] The vector sensor has the function of locating the underwater sound source target, and can be used as an important equipment for obstacle avoidance of various civil ships, fishing, and ocean exploration. With the rise of the MEMS industry, vector hydrophones are gradually developing towards miniaturization and integration, and have broad military and civilian prospects. Because the existing MEMS vector hydrophone can only measure the sound field vector information, and the sensitivity and frequency response bandwidth are not ideal, there are defects such as blurring of starboard and starboard. However, in the same test process, it is often encountered that the magnitude and frequency of many sound signals to be measured are different, and accurate positioning of the sound s...

Claims

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Application Information

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IPC IPC(8): G01H11/08
CPCG01H11/08
Inventor 张国军刘梦然张文栋
Owner ZHONGBEI UNIV
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