Three-surface interference type high-accuracy curved surface profile measuring system and method

A technology of curved surface profile and measurement system, which can be used in measurement devices, instruments, optical devices, etc., and can solve the problem of high measurement cost

Inactive Publication Date: 2016-08-24
GUANGDONG UNIV OF TECH
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  • Abstract
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  • Application Information

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Problems solved by technology

At present, this technology is mainly based on the principle of contrast measurement method, and the measurement accuracy can reach sub-micron level, but it needs a high-precision contrast measurement reference surface, which is not easy for users to satisfy, and the measurement cost is high

Method used

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  • Three-surface interference type high-accuracy curved surface profile measuring system and method
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  • Three-surface interference type high-accuracy curved surface profile measuring system and method

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Embodiment Construction

[0036] The present invention will be further described below in conjunction with example and accompanying drawing, but protection scope of the present invention should not be limited.

[0037] Laser controller (1) uses ILX Lightwave LDC-3724, semiconductor laser (2) uses DFB semiconductor laser LD-0855-0150-DFB-1 of Toptica company, center wave number 7.39×10 6 m -1 , during the wavenumber scanning process, the wavenumber has no mode hopping, and the scanning range is 4.13×10 3 m -1 . Optical wedge (7) center thickness 6mm, inclination angle 6', CCD camera (8) uses PCO1600 of PCO company. Computer (9) uses Windows XP 32 bit system, 2G internal memory. The three-surface interferometric high-precision surface profile measurement system is built on the anti-vibration platform DH-OTB-1200-800-100 of Daheng Optoelectronics Company.

[0038] The tested part (6) is the LOGO of the Apple iPad Air. After the tested part is installed and fixed, the computer controls the semiconduct...

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Abstract

The invention discloses a three-surface interference type high-accuracy curved surface profile measuring system and method. According to the measuring system, the 3D profile information of the surface of a measured part is obtained by using the Michelson interference principle. According to the system and method of the invention, a computer is utilized to control a semiconductor laser to carry out wave number scanning, and at the same time, a CCD camera continuously captures interference images under different wave numbers; wave number online monitoring is performed on the interference image of the front surface and back surface of an optical wedge in an optical path; Fourier transformation is performed on each pixel of the interference image along the time axis, wrapping phase information is extracted at the peaks of the interference signals of the profile of the curved surface of the measured part and the front surface of the optical wedge; and after the wrapping phase information is unwrapped, the 3D profile information of the surface of the measured part can be obtained. With the system and method adopted, the 3D profile measuring accuracy of the curved surface can achieve + / -10nm, and the system and method are stable and reliable and do not need frequent real-time verification and a reference hook surface, and can maintain high accuracy.

Description

technical field [0001] The invention proposes a three-surface interference type high-precision curved surface profile measurement system and method, which are suitable for precision testing, numerical control equipment and other fields, and belong to the field of object surface three-dimensional profile measurement. Background technique [0002] High-precision surface profile measurement technology has a wide range of applications in optical parts manufacturing, mold processing and other fields. At present, this technology is mainly based on the principle of contrast measurement method, and the measurement accuracy can reach sub-micron level, but it needs a high-precision contrast measurement reference surface, which is not easy for users to satisfy, and the measurement cost is high. [0003] Wavenumber scanning interferometry is a technique based on laser wavenumber scanning interferometry. It uses CCD camera and computer to quickly process multiple interference images to ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24
Inventor 周延周谢创亮刘运红
Owner GUANGDONG UNIV OF TECH
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