The invention discloses a
system and a method for optical gauge sample stage calibration. Alignment of an
optical path system is carried out under the condition that an ellipsometer is of a straight-through type. The method for the optical gauge sample stage calibration includes calibration of a front
optical path and a back
optical path. Due to a knob on an
oblique incidence type crude regulation the sample stage of the ellipsometer, a polarization detection arm optical
receiver hole can receive a part of light beams; the knob on the sample stage is finely regulated so that a cross cursor indicating the light beams can appear at the central position; and a
system front portion and system back portion scan in the Z-axis direction with a step length 1, overall
light intensity received by a
detector at each height position is recorded, a
light intensity curve is drawn, and the system automatically selects the position where the maximum
light intensity value is located as the optimal relative height position of the sample stage. The system for the optical gauge sample stage calibration mainly comprises a
light source, a polarizing arm, a front-arranged four-quadrant
detector, a polarization detection arm, a spectroscope, an internally-arranged four-quadrant
detector, a
charge coupled device (CCD) detector and a computer. By means of the method for the optical gauge sample stage calibration, inclination angles and heights of the sample stage can be calibrated with high precision, besides, response is fast, and operation is simple.