Unsmooth dynamic compensation method for ultralow-frequency horizontal vibration table guide rail
A technology of dynamic compensation and vibrating table, which is applied in the direction of measuring ultrasonic/sonic/infrasonic waves, measuring devices, instruments, etc. It can solve the problems of increasing the stroke of the vibrating table, high cost of implementation, and difficulty in meeting the requirements of reducing the accuracy of the guide rail. , The compensation effect is obvious, and the effect of convenience is realized
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Embodiment 1
[0034] This embodiment uses an angle sensor to measure the pitch angle of the moving part (sliding table) of the shaking table to obtain the dynamic characteristics of the unevenness of the guide rail of the shaking table as an example. figure 1 shown.
[0035] A method for dynamically compensating for the unevenness of the guide rail of an ultra-low frequency horizontal vibrating table, comprising the following steps:
[0036] (1) Real-time measurement of the dynamic characteristics of the guide rail irregularity of the ultra-low frequency horizontal vibration table 3 , with the output of the schooled acceleration sensor 2 u ori ( t ):
[0037] (1.1), install the angle sensor 1 on the sliding table 4 of the vibration table, and use the horizontal direction as the reference direction to detect the change of the pitch angle during the movement of the sliding table; at the same time, install the acceleration sensor 2 to be calibrated on the vibration table On the sliding ...
Embodiment 2
[0055] The difference between this embodiment and Embodiment 1 is that a laser vibrometer is used to detect the pitch angle of the sliding table of the vibrating table due to the unevenness of the guide rail during the vibration calibration process based on the method of synchronous measurement of two lasers, and obtain the unevenness of the guide rail. Smoothness θ ( t ) as an example.
[0056] A method for dynamically compensating for the unevenness of the guide rail of an ultra-low frequency horizontal vibrating table, comprising the following steps:
[0057] (1) Real-time measurement of the dynamic characteristics of the guide rail irregularity of the ultra-low frequency horizontal vibration table 3 , with the output of the schooled acceleration sensor 2 u ori ( t ):
[0058] (1.1), such as Figure 4 As shown, the laser reflector frame 6 vertically installed on the slide table 4 is equipped with two reflectors, the laser vibrometer 7 and the laser vibrometer 8 are ...
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