A super-resolution traceable white light interference atomic force probe calibration device and calibration method

Abstract

The present invention discloses a calibration device and a calibration method for a super-resolution and traceable type white-light interference atomic force probe. The calibration device is used for conducting the calibration method. The core technologies of the device and the method are composed of a traceable super-resolution displacement measurement system, a white-light interference zero-level fringe positioning algorithm, an atomic force probe bending model and a calibration process. The calibration device is used for generating the deformation of the probe. The traceable super-resolution displacement measurement system is used for accurately acquiring the vertical displacement generated during the probe deformation process. The white-light interference zero-level fringe positioning algorithm is used for accurately acquiring the position of an interference fringe on the cantilever of the probe. The atomic force probe bending model is used for fitting the relationship between the vertical displacement and the position of the fringe. The calibration process comprises specific implementation steps. According to the technical scheme of the calibration device and the calibration method, the relationship between the vertical displacement and the position of the fringe can be accurately and quickly acquired. Therefore, the accurate measurement of a white-light interference atomic force probe scanning microscope is realized.

Description

technical field [0001] The invention belongs to the technical field of micro-nano surface topography measurement, and more specifically relates to a traceable probe calibration method for white light interference atomic force probe scanning microscope. Background technique [0002] The working principle of the white light interference atomic force probe scanning microscope is that when the probe is dragged on the surface of the tested sample, the probe cantilever will be bent to different degrees with the change of the surface of the tested sample, resulting in the probe cantilever The position of the interference fringes also moves accordingly, and the corresponding height information of the surface of the measured sample can be calculated according to the amount of movement of the interference fringes on the probe cantilever. [0003] Due to the very small structural size of the atomic force probe, and the limitation of the uniformity of the existing materials and the prod...

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Problems solved by technology

[0003] Due to the very small structural size of the atomic force probe, and the limitation of the uniformity of the existing materials and the production and processing technology, it is impossible to obtain an atomic force probe with the same performance indicators in all aspects, and the structural size of the atomic force probe has passed the existing technology. The conditions cannot be accurately quantified. In addition, when the probe cantilever is bent, the degree of bending corresponding to different positions on the probe cantilever is different, resulting in interference fringes corresponding to the same vertical displacement at different positions on the probe cantilever , the amount of movement produced is also different, so the relationship between the vertical displacement of the probe and the position of the interference fringes on the cantilever of the probe cannot be accurately obtained through theoretical analysis

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