Hexagon-channel silicon light conduction pipe
A hexagonal and channel technology, applied in the field of silicon light guides, can solve the problems of unreachable light transmission and achieve ideal transmission effects
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[0019] figure 1 It is a structural representation of the present invention. Such as figure 1 As shown, the present invention includes a silicon-based substrate 1 . A first silicon oxide layer 2 is epitaxially formed on the silicon base substrate 1 . A silicon region 4 with a regular hexagonal cross-section grows on the first silicon oxide layer 2 . The bottom edge of the silicon region 4 coincides with the surface of the first silicon oxide layer 2 . Bounded by the central axis in the horizontal direction of the regular hexagonal cross-section of the silicon region 4, a second silicon oxide layer 3 is wrapped around the silicon region 4 between the central axis and the first silicon oxide layer 2, On the second silicon oxide layer 3 , a third silicon oxide layer 5 is wrapped around the silicon region 4 . The length of the diagonal of the cross section of the silicon region 4 is 1 μm to 3 μm. In this embodiment, the silicon oxide layer mentioned above refers to the dioxid...
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