Electronic fun for atmospheric electron beam machining equipment

An electron beam processing and electron gun technology, applied in the field of electron beam processing equipment, can solve the problems of reducing processing efficiency, restricting the processing of large workpieces, increasing the manufacturing cost and application energy consumption of electron beam processing equipment, etc. The effect of reducing energy loss

Active Publication Date: 2016-10-12
GUILIN THD TECH CO LTD
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  • Abstract
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Problems solved by technology

[0002] Electron beam processing technology has superior performance and has been widely used in various fields of industry, but the generation of electron beam requires a vacuum environment, which greatly increases the manuf...

Method used

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  • Electronic fun for atmospheric electron beam machining equipment
  • Electronic fun for atmospheric electron beam machining equipment
  • Electronic fun for atmospheric electron beam machining equipment

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Embodiment Construction

[0022] An electron gun for atmospheric electron beam processing equipment, such as figure 1 As shown, it has an axisymmetric structure as a whole, including a first plasma window 13, a first vacuum chamber 11, a focusing device 10, a pneumatic window 9, a second plasma window 7, a second vacuum chamber 5, and an anode from bottom to top. 3. The third vacuum chamber 2 and the electron beam generator 1 .

[0023] The structure of the first plasma window 13 and the second plasma window 7 is the same, as figure 2 As shown, it consists of a plasma cathode 71, a ceramic body 72, a plasma window casing 73, a cooling chamber 74, a water inlet 75, a plasma chamber 76, a plasma anode 77 and a water outlet 78. The plasma window casing 73 is a hollow airtight cavity. A ceramic body 72 is embedded in the center of the plasma window casing 73, and the ceramic body 72 is a vertically penetrating cylinder, and divides the enclosed space surrounded by the plasma window casing 73 into two in...

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Abstract

The invention discloses an electronic fun for atmospheric electron beam machining equipment. The whole electronic fun is of an axisymmetric structure and comprises a first plasma window, a first vacuum cavity, a focusing device, a pneumatic window, a second plasma window, a second vacuum cavity, an anode, a third vacuum cavity and an electron beam generator from bottom to top. The combined structure that the first plasma window, the pneumatic window and the second plasma window are connected in series is adopted, an electron beam flying path with the extremely large vacuum gradient is formed in the electronic gun, the energy loss and energy density reduction amount of an electron beam are reduced, and therefore two main key technical problems existing in the electron beam machining process of the electron beam machining equipment in the atmosphere environment are solved.

Description

technical field [0001] The invention relates to the technical field of electron beam processing equipment, in particular to an electron gun for atmospheric electron beam processing equipment. Background technique [0002] Electron beam processing technology has superior performance and has been widely used in various fields of industry, but the generation of electron beam requires a vacuum environment, which greatly increases the manufacturing cost and application energy consumption of electron beam processing equipment, and at the same time greatly reduces the processing efficiency, which is even more restrictive. Applied to the processing of large workpieces. However, two key technologies need to be solved for electron beam processing in the atmospheric environment: one is that the energy loss of the electron beam drawn from the vacuum electron gun chamber to the atmosphere should not be too large; The energy density cannot be reduced too low. Contents of the invention ...

Claims

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Application Information

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IPC IPC(8): H01J37/063H01J37/065
CPCH01J37/063H01J37/065
Inventor 韦寿祺朱国坤黄小东张建飞黄兴泉覃胤鸿
Owner GUILIN THD TECH CO LTD
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