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Active element and fabricating method thereof

A technology of active components and manufacturing methods, applied in the direction of electrical components, semiconductor/solid-state device manufacturing, semiconductor devices, etc., can solve problems such as excessive feed-through voltage, and achieve the effect of reducing feed-through voltage

Inactive Publication Date: 2016-10-19
CHUNGHWA PICTURE TUBES LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] The invention provides an active element, which can improve the problem caused by excessive feedthrough voltage in the prior art

Method used

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  • Active element and fabricating method thereof
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  • Active element and fabricating method thereof

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Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0053] The manufacturing method of the active device according to an embodiment of the present invention is introduced as follows. first as Figure 2A As shown, a gate 110 is formed on a substrate 50 . The material of the substrate 50 can be glass, quartz, organic polymer, opaque / reflective material (such as conductive material, chip, ceramic, etc.) or other suitable materials. The material of the gate 110 is generally a metal material. But the present invention is not limited thereto. In other embodiments, the material of the gate 110 can also be other conductive materials, such as alloys, nitrides of metal materials, oxides of metal materials, oxynitrides of metal materials, or metal materials. Stacked layers with other conductive materials.

[0054] Please refer to Figure 2A and Figure 2B , first as Figure 2B As shown, a first insulating layer 122 is formed on the substrate 50 and covers the gate 110 , and the first insulating layer 122 is distributed in a first re...

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PUM

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Abstract

An active element and a fabricating method thereof are provided. The active element includes a gate, a gate insulating layer, a channel, a source and a drain. The gate is disposed on a substrate. The gate insulating layer is disposed on the substrate and covers the gate. The gate insulating layer is divided into a first region having uniform thickness and a second region having uniform thickness. The thickness of the gate insulating layer in the first region is different from the thickness of the gate insulating layer in the second region. The channel is disposed on the gate insulating layer. The source and the drain are disposed on the gate insulating layer and separated from each other. The distribution region of the source and the drain is identical to the distribution region of the first region. The channel contacts with the source and the drain. According to the invention, the problem caused by excessive feed-through voltage of conventional technology is improved.

Description

technical field [0001] The invention relates to a component and a manufacturing method thereof, in particular to an active component and a manufacturing method thereof. Background technique [0002] Liquid Crystal Displays (LCD for short) with superior characteristics such as high image quality, good space utilization efficiency, low power consumption, and no radiation have gradually become the mainstream of the market. Generally speaking, a liquid crystal display includes a liquid crystal display panel (LCD panel) and a backlight module for providing a surface light source, wherein the liquid crystal display panel usually includes a thin film transistor array substrate (Thin Film Transistor Array Substrate, referred to as TFT array substrate), a color filter A substrate (Color Filter substrate, CF substrate for short) and a liquid crystal layer (liquid crystal layer) located between the two substrates. [0003] figure 1 It is a schematic circuit diagram of an existing pix...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L29/786H01L29/423H01L21/28H01L21/336
CPCH01L29/42368H01L29/66765H01L29/78669H01L29/42384H01L2029/42388
Inventor 王豪伟江佳铭赖枝文
Owner CHUNGHWA PICTURE TUBES LTD