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Micro Positioning Gap Sensor Assembly

A gap sensor, micro-positioning technology, applied in the direction of measuring instrument components, conversion sensor output, mechanical gap measurement, etc., can solve the problem of lack of responsiveness of mass flow control system

Active Publication Date: 2019-06-04
HORIBA STEC CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In situations where almost instantaneous changes in flow are required, mass flow control systems may lack sufficient responsiveness

Method used

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  • Micro Positioning Gap Sensor Assembly
  • Micro Positioning Gap Sensor Assembly
  • Micro Positioning Gap Sensor Assembly

Examples

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Embodiment Construction

[0019] This paper discloses a micro-positioning gap sensor assembly, figure 1 and figure 2 A micropositioning gap sensor assembly 100 of a first embodiment is shown, image 3 A second embodiment of a micropositioning gap sensor assembly is shown. Turning to the first embodiment, figure 1 and figure 2 The illustrated microposition gap sensor assembly 100 includes a structural housing 102 having a flexible diaphragm 104 fixedly attached to a first end of the structural housing 102 .

[0020] Structural housing 102 may be configured to house the internal components of microposition gap sensor assembly 100 . Structural housing 102 may be configured to maintain isolation of internal components without exposure to fluids or other fundamental elements. One end of the micropositional gap sensor assembly 100 may include a cover for isolating internal components from non-system environmental elements. Additionally, the structural housing 102 may be constructed of a stainless ste...

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Abstract

The present invention relates to a micropositioning gap sensor assembly comprising a structural housing and a flexible diaphragm fixedly connected and forming a barrier against fluid ingress. The structural housing includes a shaft perpendicular to the flexible diaphragm, a first holder having one or more struts, a second holder, and a parallel plate gap sensor. The parallel plate gap sensor includes a non-contact sensing plate biased on a portion of a first holder defining a plane of the non-contact sensing plate and a target plate from a second holder. Receiving a reverse bias force of the first holder, the target plate is composed of a conductive paramagnetic material. The parallel plate gap sensor is configured such that displacement of one of the target plate or the non-contact sensing plate changes the distance between the target plate and the non-contact sensing plate.

Description

technical field [0001] The present invention relates to a micro-positioning gap sensor assembly, more particularly, to a micro-positioning gap sensor assembly that changes the distance between a target board and a non-contact sensing board through the displacement of a target board or a non-contact sensing board. Background technique [0002] With the ever-present quest to miniaturize modern technology, one of the great challenges facing engineers is to develop very small devices that can reliably operate with high precision, often in harsh environments. These devices require small moving parts such as actuators, position detectors, shock detectors, flow sensors or detectors for small surface defects with submillimeter or even submicron displacements. However, these components are difficult to fit into a sensing system that reliably measures such small displacements at this level. Furthermore, it is particularly difficult to fit into sensing systems that exhibit a high sign...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B7/14
CPCG01B7/14G01D11/245G01F1/20G01F15/003G01F15/005G01F15/022G05D7/0635G01B5/14G01D11/24G01F1/76G01F3/06G01F11/08F16K1/32F16K27/02G01D5/145G01P3/487G01F1/00
Inventor 帕特里克·艾伦·洛厄里约翰·托马斯·迪克迈克尔·亚历克斯·克雷默
Owner HORIBA STEC CO LTD
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