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Large-aperture grating ultra-short stroke nanoscale precision decoupling splicing mechanism

A technology of large-diameter gratings and mechanical devices, applied in the parts and instruments of instruments, etc., can solve the problem that large-diameter gratings cannot achieve multi-degree-of-freedom decoupling adjustment with nanometer precision, and achieve compact structure, flexible operation, and stroke. short effect

Active Publication Date: 2018-07-17
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to solve the problem that the splicing of large-aperture gratings cannot realize the decoupling and adjustment of multiple degrees of freedom with nanometer precision, and to provide a mechanical device for ultra-short-stroke decoupling splicing of large-aperture gratings with nanoscale precision

Method used

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  • Large-aperture grating ultra-short stroke nanoscale precision decoupling splicing mechanism
  • Large-aperture grating ultra-short stroke nanoscale precision decoupling splicing mechanism
  • Large-aperture grating ultra-short stroke nanoscale precision decoupling splicing mechanism

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specific Embodiment approach 1

[0029] Specific implementation mode one: as Figure 1 to Figure 18 As shown, this embodiment discloses a mechanical device for ultra-short-stroke nanoscale precision decoupling splicing of large-diameter gratings, which includes a marble base, a grating 17, two grating seats 14, and three moving platforms; The two motion platforms are respectively the first motion platform, the second motion platform and the third motion platform; the first motion platform includes the first platform 13 and two piezoelectric ceramic drivers-10; the second motion platform includes The second platform 8, a flexible support 12, two elastic leaf springs 6 and two piezoelectric ceramic drivers 9; the third motion platform includes the third platform 11 and piezoelectric ceramic drivers 3 2; the marble The base includes a marble base 7, three grating seat support plates and two aluminum alloy plates; the three grating seat support plates are respectively grating seat support plate one 5, grating sea...

specific Embodiment approach 2

[0032] Specific implementation mode two: as figure 1 , figure 2 , Figure 4 , Figure 7 , Figure 8 , Figure 11 and Figure 17 As shown, in the first embodiment of the large-aperture grating ultra-short-stroke nanoscale precision decoupling and splicing mechanical device, the upper and lower surfaces of each grating monomer 17-1 are along the longitudinal direction of the grating monomer 17-1 ( That is, the left and right directions) are each processed with one groove, the two grooves arranged on the upper surfaces of the two grating monomers 17-1 are oppositely arranged, and the two grooves arranged on the lower surfaces of the two grating monomers 17-1 are oppositely arranged , each of the grooves is fastened with two rubber pressure blocks 16; each of the upper and lower ends of the grating seat 14 are respectively provided with two bosses 14-1, each grating seat 14 The four bosses 14-1 all protrude toward the front side of the grating seat 14, each of the bosses 14-1...

specific Embodiment approach 3

[0033] Specific implementation mode three: as figure 1 , figure 2 and Figure 7 As shown in the specific embodiment 1, the large-aperture grating ultra-short-stroke nanoscale precision decoupling and splicing mechanical device, the axis of the flexible support 12 is set at the first platform 13 and the overall center of gravity of the above parts . The flexible support 12 plays a main supporting role, and the purpose is to prevent the piezoelectric ceramics from being subjected to preload or tension.

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Abstract

The invention relates to a mechanical device for large-aperture grating ultra-short stroke nano-scale precision decoupling splicing. The objective of the invention is to solve the problem of incapability of realizing nano-scale precision multi-degree-of-freedom decoupling adjustment in large-aperture grating splicing. According to the mechanical device of the invention, multi-degree-of-freedom adjustment is realized by three movement platforms; flexible pillars and two piezoelectric ceramic actuators 1 are connected with a first platform and a second platform; the extension and contraction of the two piezoelectric ceramic actuators 1 control the Y-direction rotation and X-direction rotation of the first platform respectively; the second platform is connected with a third platform through two elastic leaf springs and two piezoelectric ceramic actuators 2; the second platform is floated in the third platform; X-direction rotation and Z-direction rotation can be adjusted through the two piezoelectric ceramic actuators 2; and a piezoelectric ceramic actuator 3 responsible for Y-direction translational movement is arranged between the X-direction rotation and a marble base. With the mechanical device of the invention adopted, precise adjustment of a grating in an ultra-short stroke range from -0.05 to 0.05mm can be realized, and 10-nm translational splicing accuracy of the grating can be realized. The mechanical device of the invention is used for high-precision multi-degree-of-freedom decoupling adjustment of large-aperture grating splicing.

Description

technical field [0001] The invention relates to a mechanical device for decoupling and splicing of large-diameter gratings, in particular to a mechanical device for decoupling and splicing of large-diameter gratings under ultra-short stroke conditions. Background technique [0002] In recent years, with the continuous development and progress of science and technology, especially the successive development of some large-scale high-tech engineering projects, such as the needs of astrophysics, synchrotron radiation engineering, laser fusion device projects, and the need for diffraction gratings Technical performance puts forward higher requirements. Moreover, the availability of suitable large-area diffraction gratings has become the key to the success or failure of these large-scale high-tech engineering projects. At the same time, due to the urgent need for large-area diffraction gratings in these large-scale engineering projects, the development of large-area diffraction g...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G12B5/00
CPCG12B5/00
Inventor 白清顺沈荣琦何欣赵航张英杰张庆春
Owner HARBIN INST OF TECH