Low-temperature plasma glass cleaning device based on atmospheric pressure differential output excitation
A low-temperature plasma and plasma technology, which is applied in cleaning flexible objects, cleaning methods and utensils, chemical instruments and methods, etc., can solve the problems of high equipment noise and fragile transducers, etc., to reduce difficulty and improve electrical safety sexual effect
Active Publication Date: 2016-11-23
NANJING SUMAN PLASMA TECH CO LTD
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Problems solved by technology
[0009] Ultrasonic cleaning: Although it can clean stains on the glass surface, the ultrasonic cleaning equipment is noisy and the transducer is fragile
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[0022] Below in conjunction with accompanying drawing, technical scheme of the present invention is described in further detail:
[0023] The structural schematic diagram of the low-temperature plasma glass cleaning device disclosed by the present invention is as follows: figure 1 As shown, the device includes a plasma electrode 4, a plasma electrode fixing plate 2, an electrode gap adjustment device, and a square casing, wherein one electrode is fixed together with a metal square bracket 1 through an insulating material, and is located at the lower position, and the other electrode is also It is fixed together with the metal square bracket 1 by insulating material, and it is in the upper position, and at the same time, the height and balance position can be adjusted by the plasma electrode gap adjustment device. When the two electrodes are connected to the plasma power generator, and the plasma power generator adopts a differential output excitation method, a zero potential s...
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The invention relates to plasma cleaning equipment, and particularly relates to a low-temperature plasma glass cleaning device based on atmospheric pressure differential output excitation. The low-temperature plasma glass cleaning device comprises a low-temperature plasma excitation part and a low-temperature plasma generating device, wherein the low-temperature plasma excitation part comprises a low-temperature plasma power supply generator and a low-temperature plasma transformer; the low-temperature plasma generating device comprises two electrodes, and the low-temperature plasma power supply generator is connected with the two electrodes by virtue of the plasma transformer; the low-temperature plasma generating device further comprises a low-temperature plasma electrode gap adjusting device, a plasma electrode fixed end plate, an integral metal square bracket and a heat dissipation and ventilation interface. The low-temperature plasma glass cleaning device has the advantages of simple structure, simplicity in operation, low cost, no waste and no pollution, and a treatment effect which is difficult to achieve by a traditional glass cleaning method can be achieved.
Description
technical field [0001] The invention relates to the technical field of cleaning glass substrates in the semiconductor and display industries, in particular to a plasma cleaning device. Background technique [0002] Plasma is the fourth state of matter. It consists of an ionized conductive gas, which includes six typical particles, namely electrons, positive ions, negative ions, atoms or molecules in an excited state, atoms or molecules in a ground state, and photons. [0003] The ions, electrons, excited atoms, molecules and free radicals enriched in the low-temperature plasma space are all active particles, which are easy to react with the surface of the material. In the plasma region, the plasma can chemically react the organic matter to decompose it, or make it The particles are charged and deposited, or the bacteria are removed by ultraviolet rays or other strong oxidizing substances generated by the discharge. Therefore, it is widely used in sterilization, surface mod...
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IPC IPC(8): B08B11/04B08B7/00
CPCB08B7/00B08B11/04
Inventor 陈选章万良淏
Owner NANJING SUMAN PLASMA TECH CO LTD