Brushless rotary plasma electrode structure and film coating system

Abstract

A brushless rotary plasma electrode structure and a film coating system are disclosed. The brushless rotary plasma electrode structure includes a main body, a plurality of guided portions, and a plurality of conducting-through members. The main body further includes a plurality of electrode portions that have a first salient portion furnished at the periphery thereof. The guided portion is penetrated through the electrode portion. Each of the conducting-through members further includes a second salient portion. There is an internal in both the first salient portion and the second salient portion.

Description

technical field [0001] The invention relates to an electrode structure and a coating system, and in particular to a carbon brushless rotating plasma electrode structure and a coating system including the carbon brushless rotating plasma electrode structure. Background technique [0002] figure 1 It is a schematic diagram of the carbon brush type rotating plasma electrode structure in the prior art. see figure 1 . [0003] The conventional carbon brush rotating plasma electrode structure 10 is composed of two electrode parts 11 , two guiding parts 12 , an isolation part 13 , a carbon brush 14 made of graphite, an RF generator 15 and a ground electrode 16 . The isolation part 13 is located between the two electrode parts 11 . The guide part 12 penetrates through the two electrode parts 12 . The carbon brush 14 is arranged on the periphery of the electrode portion 11 . The RF generator 15 and the ground electrode 16 are respectively coupled to one end of the corresponding...

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Problems solved by technology

However, the rotating electrode part 11 will rub against the carbon brush 14, so frictional heat will be generated to generate high temperature, and there may be a risk of fire under long-term operation.

[0005] Furthermore, the rubbed carbon brush 14 will also produce dust (particles), and these dusts will fall to the workpiece to cause pollution, and cause the workpiece after plasma treatment to have a problem of poor yield.

In the prior art, the dust cover is used to collect dust to reduce the probability of dust falling to the workpiece, but it still cannot solve the problem of high temperature generated by the electrode part 11 rubbing the carbon brush 14, which in turn leads to an increase in impedance

It can be seen that the carbon brush type rotating plasma electrode structure 10 of the prior art also has the problem of high impedance, which will lead to poor RF energy generated.

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