Spectrum scanning test apparatus and spectrum scanning test method
A testing device and a technology of spectral scanning, applied in the field of spectral scanning testing devices with high spatial resolution, can solve the problems of wasting liquid nitrogen, difficult to implement scanning testing, large vibration and the like
Inactive Publication Date: 2016-12-07
SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
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However, due to the large vibration of the cryogenic refrigeration system, the scan test at low temperature is difficult to achieve
[0003] At present, the scanning test under low temperature conditions can only reach the temperature of liquid nitrogen (70K), and the refrigeration process wastes a lot of liquid nitrogen; and in the current spectral scanning process, the highest moving accuracy is about 100nm
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[0021] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. This invention may, however, be embodied in many different forms and should not be construed as limited to the specific embodiments set forth herein. Rather, the embodiments are provided to explain the principles of the invention and its practical application, thereby enabling others skilled in the art to understand the invention for various embodiments and with various modifications as are suited to particular intended uses. In the drawings, the shapes and dimensions of elements may be exaggerated for clarity, and the same reference numerals will be used throughout to designate the same or like elements.
[0022] figure 1 is a schematic structural view of a spectral scanning test device according to an embodiment of the present invention.
[0023] refer to figure 1 , the spectral scanning testing device according to the embodiment of the present...
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The invention discloses a spectrum scanning test apparatus. The apparatus comprises: a sample refrigeration chamber used for providing test environment with a predetermined temperature for a sample to be tested; a sample bench arranged in the sample refrigeration chamber, used for bearing the sample to be tested and moving at a displacement precision with a predetermined order of magnitude; a microscopic optical path system comprising a microscope and a laser source, wherein laser emitted by the laser source is transmitted to the sample to be tested through the microscope in order to generate excitation spectrum; and a spectrum test system used for receiving and testing the excitation spectrum. The test apparatus offers possibility for realizing the microstructure spectrum scanning test of the sample to be tested at a lowest temperature of 4 K. The invention also discloses a test method of the test apparatus. The method comprises the following steps: placing the sample to be tested on the sample bench in the sample refrigeration chamber, and refrigerating the sample to be tested; transmitting the laser emitted by the laser source to the sample to be tested through the microscope in order to generate the excitation spectrum; and receiving and testing the excitation spectrum by the spectrum test system.
Description
technical field [0001] The invention belongs to the technical field of spectrum testing, and in particular relates to a spectral scanning testing device with high spatial resolution under low temperature conditions and a testing method thereof. Background technique [0002] As an important analysis method, spectral analysis method plays a great role in scientific research, production, quality control and other aspects. With the highly integrated and reduced size of the device structure, it is particularly important to test the local structure. At present, the commercial test system can realize the scanning test of the spectrum well under the condition of room temperature. However, due to the large vibration of the cryogenic refrigeration system, the scan test at low temperature is difficult to realize. [0003] At present, the scanning test under low temperature conditions can only reach the temperature of liquid nitrogen (70K), and the refrigeration process wastes a lot o...
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IPC IPC(8): G01N21/63
Inventor 张敏顾泓周桃飞张志强刘磊田飞飞郑树楠徐科
Owner SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI