Quick detection method for LTPS-IGZO glass substrate broken hole
A technology for glass substrates and detection methods, applied in measuring devices, material analysis through optical means, instruments, etc., can solve the problems of long detection time, low efficiency, and large subjective influence, and achieve low calculation time and defect detection. High-yield, reliable results
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[0035] The accompanying drawings are for illustrative purposes only, and should not be construed as limiting the patent. The technical solutions of the present invention will be further described below in conjunction with the accompanying drawings and embodiments.
[0036] The invention provides a rapid detection method for holes in LTPS / IGZO glass substrates, see figure 1 , which includes the following steps:
[0037] Step 1: Image preprocessing. Due to the influence of mechanical vibration, shooting angle, optical distortion, etc., it is necessary to perform operations such as optical distortion processing, system vibration processing, image dynamic alignment, and sample plane correction on the collected images;
[0038] Step 2: Segment the region of interest, use the window cutting method to segment the preprocessed image. Such as figure 2 As shown, the input LPTS / IGZO glass substrate image is a large-capacity periodic complex image, which needs to be divided into small-...
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