Automatic calibration system and method for white light interferometry atomic force microscope

Abstract

The invention discloses an automatic calibration system and method for a white light interferometry atomic force microscope. The automatic calibration system mainly related in the automatic calibration control method comprises a calibration template, an atomic power probe assembly, an atomic power probe, an interference microobjective, a plane CCD and light path system, a horizontal two-dimensional motor motion platform, and a perpendicular motor motion and perpendicular nanometer displacement platform. On the basis of the automatic calibration system and the calibration method executed according to the calibration template, on the basis of the contrast relation between the light intensity on the calibration template and the light intensity on the surface of the probe, the perpendicular motor motion platform and the perpendicular nanometer displacement platform are controlled to move, and therefore the position where the probe controlled to make contact with the calibration template is controlled; in this way, calibration is completed, the method can increase the calibration speed and operation is simple.

Description

technical field [0001] The invention belongs to the technical field of ultra-precise surface topography measurement. More specifically, it refers to an automatic calibration system and an automatic calibration method for a white light interference atomic force microscope probe. Background technique [0002] The white light interference atomic force scanning probe microscope uses the zero-order fringes of white light to quantify the deformation of the atomic force scanning probe, thereby indirectly obtaining the height of the workpiece surface. Since different probes have different elastic properties, and the movement of the white light interference fringes will not be the same when the fringes measure the same height at different positions of the probe, the calibration of the atomic force probe must be used to accurately measure the surface topography of the workpiece. indispensable. [0003] The tip of the atomic force is very small, the length of the tip is only a dozen ...

AI Technical Summary

Problems solved by technology

However, if the probe is manually controlled to contact the calibration template, it is difficult to control the relationship between speed and distance during the process, which may easily cause accidental injury of the probe, and it is difficult to control the amount of probe pressing down. Therefore, the use of automatic contact control has the advantages of Significance

[0004] The common distance control methods are based on distance measurement method and image processing method. Based on the distance measurement method, additional equipment is required for assistance, which is very inconvenient to use on the instrument.

Images