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Silicon micromechanics resonance accelerometer integrated measurement and control device

A micro-mechanical resonator and accelerometer technology, applied in the direction of speed/acceleration/shock measurement, measurement device, measurement acceleration, etc., can solve problems such as out-of-lock devices, failure, etc., to reduce power consumption, low power consumption, and small size Effect

Inactive Publication Date: 2016-12-21
NANJING UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The phase control method of the phase-locked loop has the hidden danger of losing lock and causing the failure of the entire device in the case of large bandwidth

Method used

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  • Silicon micromechanics resonance accelerometer integrated measurement and control device
  • Silicon micromechanics resonance accelerometer integrated measurement and control device
  • Silicon micromechanics resonance accelerometer integrated measurement and control device

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Experimental program
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Embodiment Construction

[0034] Such as image 3 As shown, the silicon micromechanical resonant accelerometer integrated measurement and control device of the present invention,

[0035] Including a first oscillation circuit 302, a second oscillation circuit 303, a first frequency measurement circuit 304, a second frequency measurement circuit 305 and an SPI digital interface 306;

[0036] The input end of the first frequency measuring circuit 304 is connected with the output end of the first oscillating circuit 302, and its output end is connected with the first input end of the SPI digital interface 306, and the input end of the first oscillating circuit 302 is used for and A micromachined resonator of the silicon micromachined resonant accelerometer 301 is electrically connected,

[0037] The input end of the second frequency measuring circuit 305 is connected with the output end of the second oscillating circuit 303, and its output end is connected with the second input end of the SPI digital int...

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Abstract

The invention provides a silicon micromechanics resonance accelerometer integrated measurement and control device. The device comprises a first oscillation circuit (302), a second oscillation circuit (303), a first frequency measurement circuit (304), a second frequency measurement circuit (305) and an SPI digital interface (306). The first oscillation circuit (302) and the second oscillation circuit (303) are used for controlling a micromechanics resonance beam to maintain constant amplitude vibration at the resonance frequency according to set displacement through electrostatic driving and capacitance detection. The first frequency measurement circuit (304) and the second frequency measurement circuit (305) measure the frequency of analog oscillation signals output by the oscillation circuits and output the frequency in digital signals. The SPI digital interface (306) is used for transmitting two frequency measurement digital signals to an embedded processor (307). The device provided by the invention has the advantages of small volume, low power consumption and low noise.

Description

technical field [0001] The invention belongs to the technical field of acceleration measurement, in particular to a self-excited oscillation integrated measurement and control device specially used for a silicon micromechanical resonant accelerometer. Background technique [0002] The resonant accelerometer based on silicon micromachining technology is small in size, can be processed in batches, has high measurement accuracy, and has a large dynamic range. At present, the stability of the zero bias has been able to achieve the level of inertial navigation, and the stability of the scale factor has reached below 1ppm. [0003] Such as figure 1 Shown is the sensitive structure placed inside a silicon micromachined resonant accelerometer. It is a symmetrical structure about axis 106 . Including: mass block 101, mass block elastic support beams 102, 110, 111, 112, micro levers 103, 109, micromechanical vibration beam resonators 104, 107, anchor points 105, 108, 110, 112, 113, ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/125
CPCG01P15/125
Inventor 夏国明赵阳裘安萍施芹
Owner NANJING UNIV OF SCI & TECH