Electrode used for single crystal furnace body and use method thereof

Abstract

The invention relates to an electrode used for a single crystal furnace body and a use method thereof. The electrode comprises an electrode body, an isolation plate and an electrode fixing plate, wherein one part of the electrode body is arranged in the furnace body, the other part of the electrode body extends out of the furnace body; the isolation plate is fixedly arranged on the furnace body and is vertically connected with the electrode body extending outside the furnace body; the electrode fixing plate is provided with a vertical strip-shaped regulation hole, the electrode body is provided with a mounting hole adapted to the strip-shaped regulation hole, and the electrode body is fastened to the electrode body and the isolation plate through a bolt which is arranged in the vertical strip-shaped regulation hole and the mounting hole in a penetrating manner. The electrode is suitable for being used by the single crystal furnace, also suitable for industrial devices or equipment adopting electrode heating, such as a polycrystalline furnace, a diffusion furnace, an annealing furnace, a synthetic furnace, an oxidizing furnace. The electrode has the advantages of simple structure, reasonable design, convenient use and exchange, effective improvement of mounting efficiency, low production and maintenance cost, and the like.

Description

technical field [0001] The invention relates to the field of semiconductor material processing, in particular to an electrode for a single crystal furnace body and a method for using the same. The invention is suitable for use in single crystal furnaces, and is also suitable for industrial equipment or equipment using electrode heating such as polycrystalline furnaces, diffusion furnaces, annealing furnaces, synthesis furnaces, and oxidation furnaces. Background technique [0002] In recent years, with the rapid development of the domestic semiconductor industry, more stringent requirements have been placed on the quality of semiconductor materials, especially the requirements on the quality of single crystal products and production equipment. At present, there are many kinds of single crystal production enterprises in China. The electrode structure used in the existing single crystal production mainly uses steel bars to weld the electrode fixing piece, so that the electrode...

AI Technical Summary

Problems solved by technology

When it is necessary to replace the electrode, electrode fixing piece or insulation piece, it is usually disassembled by cutting the steel bar. This method is inconvenient for the replacement of parts and increases the production cost. It cannot achieve the effect of timely replacement, thus affecting the single crystal production efficiency

In addition, if the existing electrode structure is adopted, it is easy to cause the electrode to be collided by external force during transportation, causing extrusion inside the furnace, causing the heating wire to shift and deform, and causing the heating wire to become soft and damaged during the electrification process, affecting Normal use of the furnace body

Some single crystal production enterprises do not use the method of welding and fixing the electrodes, but simply deal with the electrodes and the furnace body directly, which is easy to cause losses to the parts in the furnace body, thus increasing the production cost and restricting the development of single crystal production equipment

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