Data backup system and method of manufacturing execution system

Abstract

The invention discloses a data backup system of a manufacturing execution system. The data backup system comprises a backup database setting module for establishing a backup database based on a production database of the manufacturing execution system, wherein the storage mode for wafer batch information in the backup database is same as that for the wafer batch information in the production database; a data relation package generating module for importing the wafer batch information meeting the deadline into the backup database based on a wafer batch information extraction mechanism; and a data deleting module for deleting the imported wafer batch information in the production database according to an order based on the wafer batch result imported in the backup database. The invention also discloses a data backup method of the manufacturing execution system. The data backup system and method of the manufacturing execution system provided by the invention can efficiently reduce consumption cost of hardware resources, human cost of database maintenance personnel and time cost.

Description

technical field [0001] The present invention relates to the technical field of semiconductor manufacturing execution systems, in particular to a data backup system and method for manufacturing execution systems. Background technique [0002] The production of modern large-scale integrated circuits is a high-tech manufacturing process. Due to the wide variety of products and complex processing procedures, semiconductor companies are required to implement more lean management of the production process, and the Manufacturing Execution System (MES) provides users with a refined The manufacturing environment helps enterprises to reduce costs, deliver goods on schedule, improve product quality and service quality. Therefore, all semiconductor production enterprises have a production execution system (MES) to monitor and manage the production site. It can be said that the MES system is crucial to the production of advanced fabs. [0003] As the production process continues, the M...

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Problems solved by technology

[0005] However, as the production process continues and the production process becomes more and more complex, the production database will also become larger and larger. Backing up the production database on a quarterly basis requires a lot of hard disk space to support it, which increases the hardware resources. Consumes costs, but also increases the labor costs of database maintenance personnel

Moreover, restoring the backup database is very time-consuming. It takes at least one week from the user submitting the application for restoration to the data restoration to the user. This increases the user's waiting time and downtime for the lot process data, and affects the lot recovery. processing flow

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