Three-dimensional oval micro displacement motion platform under three-piezoelectric perpendicular drive

A vertical drive and motion platform technology, applied in the direction of large fixed members, metal processing machinery parts, metal processing equipment, etc., to achieve the effect of simple fine-tuning process, small adjustable range and easy control

Inactive Publication Date: 2017-01-11
CHANGCHUN UNIV OF TECH
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  • Summary
  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

However, there are few studies on the micro-feed motion platform of precision and ultra-precision machine tool workpieces. Among the currently available micro-feed motion platforms for machine tool workpieces, patent ZL201520919504.3 proposes a piezoelectric-driven three-dimensional elliptical micro-feed motion platform, which makes the workpiece Three-dimensional elliptical motion trajectory is generated under the drive of piezoelectric stack

Method used

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  • Three-dimensional oval micro displacement motion platform under three-piezoelectric perpendicular drive
  • Three-dimensional oval micro displacement motion platform under three-piezoelectric perpendicular drive
  • Three-dimensional oval micro displacement motion platform under three-piezoelectric perpendicular drive

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Embodiment Construction

[0031] The right side plate 2 and the left side plate 3 are respectively fixedly connected with the base 1, and the upper plate 4 is fixedly connected with the right side plate 2 and the top of the left side plate 3 through the side plate connecting hole 404, and there are four center symmetrical plates on the upper plate 4. Distributed flexible hinges 402, four flexible hinges are connected around the workpiece base 401, the rear end of the X-axis piezoelectric stack 501 is connected to the X-axis piezoelectric stack fixing hole 403a on the upper plate, and the front end is in contact with the flexible hinges. The micro-displacement sensor 601 is connected to the X-axis micro-displacement sensor fixing hole 405a on the upper plate and is located on the opposite side of the X-axis piezoelectric stack, and the rear end of the Y-axis piezoelectric stack 502 is connected to the upper Y-axis piezoelectric stack fixing hole 403b plate , the front end is in contact with the flexible ...

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Abstract

The invention relates to a three-dimensional oval micro displacement motion platform under three-piezoelectric perpendicular drive and belongs to the field of micro-nano and ultraprecise manufacture and multi-axis motion platform precision control. The three-dimensional oval micro displacement motion platform comprises a base, a right side plate, a left side plate, an upper plate and a fine adjustment device. X-axis and Y-axis piezoelectric stacks are fixed to the upper plate, a Z-axis piezoelectric stack is perpendicular to the other two piezoelectric stacks, signals are input to drive the three piezoelectric stacks to generate high-frequency vibration, and a workpiece on a workpiece base is driven to generate an elliptic motion track in a three-dimensional space. The three-dimensional oval micro displacement motion platform has the advantages of being novel in structure, high in rigidity and good in stationarity, four flexible hinges are in central symmetry distribution, motion accuracy of the micro displacement motion platform is controlled easily, and an oval track of the micro displacement motion platform in the three-dimensional space is controlled easily.

Description

technical field [0001] The invention belongs to the field of micro-nano and ultra-precision manufacturing and multi-axis motion platform precision control, in particular to a three-dimensional ellipse micro-displacement motion platform driven vertically by three piezoelectrics. Background technique [0002] In recent years, precision ultra-precision machining technology has gradually become an important part of the machinery manufacturing industry, and its development level is one of the important symbols to measure the level of a country's manufacturing industry. Precision ultra-precision machining has a wide range of application prospects. Its ultra-precision machining technology is not only applicable to the cutting of various small parts and molds, the milling of micro-cavity molds, the processing of electronic components (such as the processing of silicon wafers), etc. In the field of national economic construction, it is also of great significance for the processing of...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23Q1/34
CPCB23Q1/34
Inventor 卢明明林洁琼周家康谷岩于保军韩金国赵东坡李乾管亮
Owner CHANGCHUN UNIV OF TECH
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