60-pair-rod improved Siemens process polycrystalline silicon reducing furnace base plate
A Siemens method and reduction furnace technology, applied in the field of polysilicon reduction furnace chassis, can solve the problems of low heat radiation utilization rate, limited output, low primary conversion rate, etc., to achieve full utilization, improve quality and output, and increase output.
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specific Embodiment approach 1
[0021] Specific implementation mode one: the following combination figure 1 This embodiment will be specifically described.
[0022] A 60-pair-rod modified Siemens method polysilicon reduction furnace chassis of this embodiment includes a chassis 1 and 120 electrodes;
[0023] A central mixed gas inlet nozzle 2 is provided at the center of the chassis 1;
[0024] Along the direction from the center of the chassis 1 to the periphery of the chassis, the ring center line 3 of the first electrode ring, the ring center line 4 of the second ring of the electrode, the ring center line 5 of the first ring of the mixed gas inlet nozzle, the ring center line 6 of the third ring of the electrode, and the ring center line 6 of the mixed gas inlet Gas nozzle second-ring annular centerline 7, electrode fourth-ring annular centerline 8, mixed gas inlet nozzle third-ring annular centerline 9, electrode fifth-ring annular centerline 10, and chassis outlet ring annular centerline 11;
[0025]...
specific Embodiment approach 2
[0035]Embodiment 2: This embodiment differs from Embodiment 1 in that: the diameter of the chassis 1 is 4000mm. Others are the same as in the first embodiment.
specific Embodiment approach 3
[0036] Embodiment 3: This embodiment differs from Embodiment 1 or Embodiment 2 in that: the diameter of the chassis 1 is 3600mm. Others are the same as in the first or second embodiment.
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