In-situ high temperature micromechanics testing device in scanning electron microscope

Abstract

The invention discloses an in-situ high temperature micromechanics testing device in a scanning electron microscope. The device comprises a control system, an extension testing device, a heating device and a fixing device, wherein the extension testing device is provided with a containing space, and the heating device is arranged in the containing space; the bottom ends of the extension testing device and the heating device are respectively connected with the fixing device; the bottom end of the fixing device is fixedly connected with a sample support frame of the scanning electron microscope; the extension testing device, the heating device and the fixing device are all fixed in a chamber of the scanning electron microscope; the scanning electron microscope, the extension testing device and the heating device are respectively and electrically connected with the control system. The testing device provided by the invention is compact in structure, and can be conveniently installed in the microscope; by arranging the heating device, a test can be carried out under the condition of high temperature load; after the testing device is adopted, the in-situ imaging dynamic observation on a test sample under the actions of high temperature load and stress load is conveniently realized by using scanning electron beams, and the composition information spectrum and crystal structure information graph of the sample in the same observation micro area can be acquired at the same time.

Description

technical field [0001] The invention relates to the technical field of in-situ characterization of material microstructure and performance, in particular to an in-situ high-temperature micromechanical testing device in a scanning electron microscope. Background technique [0002] Scanning electron microscopy is one of the main tools for testing the microstructure of materials. It can measure the microstructure across scales from macro-to microscopic, and even nano-sized materials. It is an important means to reveal the microstructure of materials. [0003] In addition, the scanning electron microscope can be configured with an energy dispersive spectrometer (EDS) and an electron backscatter diffractometer (EBSD), which can establish a corresponding relationship between the microstructure of the material, the composition information of the microregion, and the crystallographic orientation. The scanning electron microscope has the characteristics of continuously adjustable mag...

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Problems solved by technology

[0004] However, the current commercial in-situ stretching benches are designed to be large in size and high in weight, so they can only perform horizontal tensile tests at lower temperatures, and cannot perform high-temperature loads on samples in the scanning electron microscope sample chamber. Simultaneous realization of large-angle tilting for the study of EBSD crystal micro-orientation

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