Electric adjustable coating baffle device and coating equipment
A technology of baffle device and coating equipment, which is applied in sputtering coating, ion implantation coating, vacuum evaporation coating, etc. It can solve the problems of wasting time, limited adjustment range, high production cost, etc., and avoid cost and time waste , solve the effect of limited adjustment range, save time and cost
Active Publication Date: 2017-02-15
XINYI GLASS (TIANJIN) CO LTD
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Problems solved by technology
[0003] The purpose of the present invention is to provide an electrically adjustable coating baffle device and coating equipment, aiming to solve the problem of the limited adjustment range of the method for adjusting the process gas in the coating in the prior art and the waste of time and production cost of the return gas in the atmospheric state. costly technical issues
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[0026] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. Attached below by reference Figure 1~4 The described embodiments are exemplary and are intended to explain the present invention, but should not be construed as limiting the present invention.
[0027] In describing the present invention, it should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", The orientation or positional relationship indicated by "horizontal", "top", "bottom", "inner", "outer", etc. are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than Nothing indicating or implying that a referenced device or...
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The invention relates to the technical field of automatic equipment, and particularly relates to an electric adjustable coating baffle device and coating equipment. The electric adjustable coating baffle device disclosed by the invention is applied to the coating equipment. The coating equipment comprises a target material and a substrate which are arranged in a spaced manner; the electric adjustable coating baffle device comprises a base plate, a baffle component and an adjusting mechanism, wherein the baffle component is arranged above the base plate; and the adjusting mechanism is arranged above the base plate, is connected with the baffle component and is used for controlling the baffle component to move so that the baffle component can extend out of the base plate and reach a place between the target material and the substrate. In a vacuum coating process, when a non-uniform region is detected in a membrane layer on the substrate, the adjusting mechanism is used for controlling the baffle component to extend out of the base plate and reach the place between the target material and the substrate, so that the baffle component can obstruct the substrate in a region in which the membrane layer is relatively thick, and thus the uniformity of the membrane layer in the region can be controlled. The electric adjustable coating baffle device disclosed by the invention can be used for implementing large-range adjustment of the uniformity of the membrane layer on the substrate in a vacuum state, so time and cost are effectively saved.
Description
technical field [0001] The invention relates to the technical field of automation equipment, in particular to an electrically adjustable coating baffle device and coating equipment. Background technique [0002] During the use of vacuum coating equipment, the problem of target sputtering uniformity fluctuations often occurs. At present, process gas is generally used for fine-tuning. However, the adjustment range of the process gas is limited. When the sputtering uniformity of the target material fluctuates greatly, it can only be processed in the atmospheric state by returning the gas, and then vacuumize and return to the production state after adjustment. However, the method of treating the return gas in the atmospheric state is limited to the rotating cathode, and it is powerless for the planar cathode. In addition, the adjustment period of the return air treatment method in the atmospheric state generally exceeds 24 hours, and the expected effect may not be achieved aft...
Claims
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IPC IPC(8): C23C14/54C23C14/34
CPCC23C14/34C23C14/542
Inventor 董清世孙学强杨志远
Owner XINYI GLASS (TIANJIN) CO LTD
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