Temperature control system and temperature control sample stage for atomic force microscope
An atomic force microscope and sample stage technology, applied in the field of sample stage, can solve the problems of long time consumption, high energy consumption, inaccurate temperature adjustment, etc., and achieve the effects of precise target temperature control, low energy consumption, and quick temperature adjustment.
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Embodiment 1
[0017] This embodiment is a temperature-controlled sample stage for an atomic force microscope, such as figure 1 , figure 2 As shown, it includes a table top 11 , a sample pool 12 and a temperature control chamber 13 . The table top 11 is a circular disk structure with a diameter of 6-10 cm. The sample cell 12 is arranged on the table top 11 and is a structure surrounded by a ring above the table top 11 . A temperature measuring probe 21 is fixed in the sample pool 12 . The temperature measuring probe 21 is externally connected with a temperature measuring connector 31 . In this embodiment, the temperature measuring probe 21 is fixed in the sample cell 12 by pasting.
[0018] The temperature control chamber 13 is located under the table top 11 and is a chamber located under the sample pool 12 . Specifically, the temperature control chamber 13 is a structure surrounded by a circular body with a side opening 132 under the platform 11 . The diameter of the torus surroundin...
Embodiment 2
[0024] This embodiment is a temperature control system for an atomic force microscope, such as figure 2 As shown, a temperature measuring and controlling instrument 41 , a peristaltic pump 42 and the temperature-controlled sample stage for an atomic force microscope in Embodiment 1 are shown. The temperature measurement and control instrument 41 is connected to the temperature measurement probe 21 and the semiconductor temperature control chip 22 through the temperature measurement joint 31 and the temperature control joint 32 respectively. The peristaltic pump 42 is connected to the cooling coil 23 through the water inlet joint 331 and the water outlet joint 332 .
[0025] The temperature measuring and controlling instrument 41 is a sample cell temperature controller made of a single-chip microcomputer, and is used to control the temperature in the sample cell 12 . Specifically, the temperature measuring and controlling instrument 41 obtains the temperature in the sample ce...
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