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Semiconductor manufacturing control method and system based on mes system

A manufacturing control and semiconductor technology, applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve the problems of time and cost waste in the manual approval process, failure to report and process in time, and achieve strong functionality and practicability. Simplify Approval process, high real-time effect

Active Publication Date: 2020-08-07
FOUNDER MICROELECTRONICS INT
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] However, in such a manufacturing process, due to the limitations of manual operations, operators may not be able to report and deal with problems in time when they find problems. Even after reporting, time and cost will be wasted due to the complexity of the manual approval process

Method used

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  • Semiconductor manufacturing control method and system based on mes system
  • Semiconductor manufacturing control method and system based on mes system
  • Semiconductor manufacturing control method and system based on mes system

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Embodiment Construction

[0031]In order to understand the above-mentioned purpose, features and advantages of the present invention more clearly, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that, in the case of no conflict, the embodiments of the present application and the features in the embodiments can be combined with each other.

[0032] In the following description, many specific details are set forth in order to fully understand the present invention. However, the present invention can also be implemented in other ways different from those described here. Therefore, the protection scope of the present invention is not limited by the specific details disclosed below. EXAMPLE LIMITATIONS.

[0033] figure 1 A flow chart of a semiconductor manufacturing control method based on an MES system according to an embodiment of the present invention is shown.

[0034] like figure 1 As shown, th...

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Abstract

The invention proposes an MES system-based semiconductor fabrication control method and system. The MES system-based semiconductor fabrication control method comprises the steps of acquiring production data of a semiconductor from an MES system; creating a production abnormity document according to a creation command received from an operation monitoring account and the production data of the semiconductor, and sending an operation stop command to the MES system so that the MES system stops the production process of the semiconductor; uploading a semiconductor abnormity document to a management account so that a processing instruction on the semiconductor is received by the management account; and executing the processing instruction from the management account. Through the abovementioned technical scheme, a signature process, namely the handling process is achieved, the approval process is simplified, and the production efficiency is improved; and meanwhile, the MES system-based semiconductor fabrication control method and system also have the characteristics of high real-time performance, high functionality and practicability and the like, and is simple and convenient to operate.

Description

technical field [0001] The present invention relates to the field of terminal technology, in particular to a semiconductor manufacturing control method based on an MES system and a semiconductor manufacturing control system based on an MES system. Background technique [0002] In the production process of semiconductors, it is inevitable that there will be abnormal situations such as dust pollution on the surface of semiconductors such as wafers and silicon wafers due to environmental pollution, damage to semiconductor products due to abnormal machines, or unqualified semiconductor products after measurement due to other factors. It is difficult for the operator to find and deal with it in the first place, which requires the subjective flexibility of the operator, so that the operator can ask questions based on their own experience, suspend the operation, report the problem to the superior, and wait for the conclusion of the professional to determine the follow-up operation ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/67
CPCH01L21/67276
Inventor 詹祥宇
Owner FOUNDER MICROELECTRONICS INT
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