A superimposed quartz boat for vertical diffusion furnace

Abstract

The invention discloses a special overlapped quartz boat for a vertical diffusion furnace and belongs to the technical field of quartz boat structures. The special overlapped quartz boat comprises a quartz boat body, boat slots used for holding silicon wafers are formed in the body, the body comprises a hollow central cylinder, support plates and a plurality of quartz rods, and the support plates are arranged on the outer side surface of the central cylinder evenly circumferentially and are parallel relative to the central axis of the central cylinder; the quartz rods are arranged between every two adjacent support plates in parallel and are arrayed correspondingly to lower arcs of the silicon wafers at intervals, a plurality of carved slots are evenly formed in one side, facing the silicon wafers, of each quartz rod, the carved slots among the quartz rods are in one-to-one correspondence and jointly form the boat slots, and the boat slots are arranged radially by centering on the central axis of the central cylinder; air vents penetrating through the inner cavity of the central cylinder are arranged in the positions, between every two adjacent support plates, of the central cylinder. The special overlapped quartz boat is applicable to the vertical diffusion furnace, and by improvement in the quartz boat structure and circumferential arrangement of the boat slots, the space of the quartz boat is utilized maximally.

Description

Technical field [0001] The invention relates to the technical field of quartz boat structures, in particular to a superimposed quartz boat special for vertical diffusion furnaces. Background technique [0002] Ordinary quartz boats are rectangular or elongated, and the boat grooves are perpendicular to the direction of the axis; the width of the boat groove will be greater than the thickness of the silicon wafer, and when the width of the boat groove is equal to the thickness of the silicon wafer, the boat groove is There will be friction with the silicon wafer during the insertion and unplugging process, which will damage the silicon wafer. Therefore, the width of the boat groove should be greater than the thickness of the silicon wafer to ensure the convenient placement of the silicon wafer and avoid unnecessary friction between the boat groove and the silicon wafer. But this will also cause the silicon wafer to be placed in the quartz boat not completely vertical, and there wi...

AI Technical Summary

Problems solved by technology

[0003] 1. When the width of the quartz boat increases with the increase in the number of times of use, the silicon wafer will be inclined to fit, the yield rate will decrease, and the reliability of the quartz boat will deteriorate; the quartz boat needs to be replaced frequently, and the cost will increase

[0004] 2. One quartz boat corresponds to one diffusion furnace. The quartz boat is arranged in a long strip shape, and the interval between the boat grooves is relatively large to ensure the interval between the silicon wafers and prevent mutual contact; resulting in a small number of quartz boat boat grooves, single furnace Low Yield

[0005] 3. The path of the diffusion source in the quartz boat is not smooth, it is easy to fluctuate, the diffusion uniformity is insufficient, and the quality of silicon wafers is poor

Images