Differential measuring device and method for large-aperture free surface sample surface profile
A surface profile and differential measurement technology, applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of easily damaged samples, small measurement range, slow measurement speed, etc., to improve the measurement speed, reduce the measurement cost, improve Effect of measuring range
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[0025] Specific embodiment one: combination figure 1 To illustrate this embodiment, a large-diameter free-form surface sample surface profile differential measurement device described in this embodiment includes:
[0026] Illumination module, first detection module and second detection module:
[0027] According to the propagation direction of the illumination light, the illumination modules are: laser 1, collimator 2, aperture 3, PBS-4, high-speed digital scanning galvanometer 5, high-speed digital scanning galvanometer 2, scanning lens 7 and three-dimensional Micro displacement stage 9;
[0028] According to the signal light propagation direction, the first detection module is: scanning lens 7, high-speed digital scanning galvanometer two 6, high-speed digital scanning galvanometer one 5, PBS-4, filter 10, PBS two 11, collecting lens One 12, multimode fiber one 13 and PMT one 14;
[0029] According to the signal light propagation direction, the second detection module is: scanning ...
Example Embodiment
[0040] Specific implementation manner two: combination figure 1 with figure 2 To explain this embodiment, this embodiment is based on a large-diameter free-form surface sample surface profile differential measurement method of a large-diameter free-form surface sample surface profile differential measurement device described in the first embodiment. The method includes the following steps:
[0041] Step a: Plating a layer of fluorescent substance on the surface of the sample 8 to be tested;
[0042] Step b. The laser light emitted by the laser 1 passes through the collimator lens 2 to form parallel light, the parallel light enters the PBS-4 through the aperture 3, and the laser light transmitted by the PBS-4 passes through the high-speed digital scanning vibration Mirror one 5, high-speed digital scanning galvanometer two 6, high-speed digital scanning galvanometer two 6 is reflected to the scanning lens 7, and the scanning lens 7 focuses the laser on the surface of the sample 8 t...
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