Magneto-electro-thermo multi-parameter coupling microscope probe, and preparation method and detection method thereof
A multi-parameter, microscope technology, applied in the probe field of scanning probe microscope, can solve the problems of not avoiding the interference of thermal signals and electrical signals, the signals are easy to interfere with each other, and the preparation is difficult, so as to achieve the difficulty of preparation, thermoelectric circuit The effect of simple structure and simple electric circuit structure
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[0050] In this embodiment, a commercially available uncoated Si probe is selected, and its structure is as follows figure 1 As shown, it includes a probe arm 1 and a needle tip body 2 connected with the probe arm 1 . Such as figure 1 , 2 As shown, the tip body 2 has a tetrahedral pyramid structure, which is composed of a front face 5, a back face 6 opposite to the front face, and two side faces.
[0051] Such as image 3 As shown, the surface of the entire probe arm and tip body is divided into area A and area B. image 3 The area filled with the horizontal line is area A, which is composed of part of the surface of the probe arm 1 ( image 3 The surface of the probe arm filled with the horizontal line) and the two sides of the tip body 2 ( image 3 The surface of the tip body filled with the horizontal line), and this area A includes the tip of the tip body. In the entire surface of the probe arm and the tip body, the remaining surface except the area A is the area B. ...
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