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Intelligent loading box

A loading box, intelligent technology, applied in the direction of electrical components, circuits, semiconductor/solid-state device manufacturing, etc., can solve problems such as calibration errors, downtime, etc., to achieve the effect of improving efficiency

Inactive Publication Date: 2017-05-03
SEMICON MFG INT (SHANGHAI) CORP +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Aiming at the deficiencies of the prior art, the present invention proposes an intelligent loading box, which can give a warning when the calibration wafer exceeds the service life or is misplaced, and does not require manual operation, which greatly improves the efficiency and prevents the calibration wafer from being out of use. Calibration errors caused by deadlines or misplaced positions, or even downtime during calibration

Method used

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Embodiment Construction

[0021] In the following description, numerous specific details are given in order to provide a more thorough understanding of the present invention. It will be apparent, however, to one skilled in the art that the present invention may be practiced without one or more of these details. In other examples, some technical features known in the art are not described in order to avoid confusion with the present invention.

[0022] It should be understood that the invention can be embodied in different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. In the drawings, the size and relative sizes of layers and regions may be exaggerated for clarity. Like reference numerals refer to like elements throughout.

[0023] In order to thoroughly understand the present invention, detailed...

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Abstract

The invention provides an intelligent loading box for loading a calibration wafer, and relates to the field of semiconductor technology. The intelligent loading box comprises a box body portion, the box body portion includes six sides, a space for loading to the calibration wafer is formed in the box body portion, and the surface of the box body portion is provided with a display unit for displaying information of the calibration wafer, a control unit for setting the information of the calibration wafer and a warning unit which raises the alarm when the calibration wafer is placed in a incorrect position. According to the intelligent loading box, alarm is raised when the calibration wafer is out of data or is placed in the incorrect position, manual operation is not needed, the efficiency is improved greatly, and the problems that calibration has errors and even shutdown occurs during calibration caused by that the calibration wafer is out of data or placed in the incorrect position can be overcome.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to an intelligent loading box. Background technique [0002] In the manufacture of semiconductor devices or integrated circuits, various measuring machines are used to measure critical dimensions, etc. In order to ensure the accuracy of the measuring machine, it is necessary to calibrate the machine regularly with a calibration wafer. To observe whether there is any error in the measured value of the machine. Calibration wafers have a certain lifespan (for example, two years). After the expiration date, the calibration wafers must be checked and calibrated by the manufacturer or a calibration organization to see if there is any error in the calibration wafers. [0003] At present, the box (FOUP) used to load the calibration wafer in the chip manufacturing factory mostly records the serial number, type, specification, applicable machine and expiration date of the calibration ...

Claims

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Application Information

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IPC IPC(8): H01L21/673
CPCH01L21/6735
Inventor 刘孜谦谭孝林
Owner SEMICON MFG INT (SHANGHAI) CORP
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