Mold and method for producing mold
A mold, normal direction technology, applied in anodizing and other directions, can solve the problem of large effect of manufacturing cost, and achieve the effect of improving manufacturing yield
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Embodiment approach 1
[0061] refer to figure 1 The moth-eye mold 100 according to Embodiment 1 of the present invention will be described. figure 1 (a) is a schematic perspective view of the moth-eye mold 100 . figure 1 (b) is a schematic cross-sectional view of a portion of the moth-eye mold 100 other than the marking portion 50 . figure 1 (c) is a schematic cross-sectional view of the marking portion 50 of the moth-eye mold 100 . figure 1 (d) is a schematic diagram when the surface of the antireflection film 32 formed using the moth-eye mold 100 is seen from the vertical direction.
[0062] Such as figure 1 As shown in (a) to (c), the moth-eye mold 100 is a cylindrical mold including an aluminum substrate 12 and a porous alumina layer 14 formed on the aluminum substrate 12 . The porous alumina layer 14 has a plurality of microscopic recesses 14p having a two-dimensional size Dp of not less than 10 nm and less than 500 nm when viewed from the normal direction of the surface on the surfac...
Embodiment approach 2
[0116] Embodiment 2 of the present invention is a moth-eye mold having a plurality of macroscopic recesses in addition to a plurality of microscopic recesses on the surface.
[0117] As described above, Embodiment 1 of the present invention has an inverted moth-eye structure formed on the surface, that is, a plurality of microscopic recesses with a two-dimensional size of 10 nm or more and less than 500 nm when viewed from the normal direction of the surface. Moth-eye molds. The mold of the embodiment of the present invention is not limited thereto. Embodiment 2 of the present invention is a moth-eye mold having an inverted moth-eye structure and an inverted anti-glare structure. That is, the moth-eye mold according to Embodiment 2 differs from Embodiment 1 in that it has not only microscopic recesses but also a plurality of macroscopic recesses whose two-dimensional size is 500 nm or more and less than 200 μm when viewed from the normal direction of the surface. The moth-ey...
Embodiment approach 3
[0121] Embodiment 3 of the present invention is a moth-eye mold that has an inverted moth-eye structure and an inverted anti-glare structure on the surface, and does not have a macroscopic concave portion in a marking portion.
[0122] refer to Figure 7 A moth-eye mold 110 according to Embodiment 3 of the present invention will be described. Figure 7 (a) is a schematic cross-sectional view of the moth-eye mold 110, Figure 7 (b) is a schematic cross-sectional view of the antireflection film 32 formed using the moth-eye mold 110 .
[0123] Figure 7 The moth-eye mold 110 shown in (a) is a cylindrical mold having a surface structure. The surface structure has: a plurality of microscopic recesses 14p having a two-dimensional size of 10 nm or more and less than 500 nm when viewed from the normal direction of the surface; and a two-dimensional size of 500 nm or more and less than 200 μm when viewed from the normal direction of the surface A plurality of macroscopic recesses 1...
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Abstract
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