Three-degree-of-freedom piezoelectric drive adjustment device and method capable of realizing translation and rotation
A piezoelectric drive and adjustment device technology, applied in the field of precision instruments, can solve the problems of heat generation, low transmission accuracy, high power consumption, etc.
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[0033] The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments.
[0034] Such as figure 1 As shown, the present invention is a three-degree-of-freedom piezoelectric drive adjustment device that can realize translation and rotation, including: a loading platform 5, a first translation mechanism 1 in the X direction located on the sides of the loading platform 5, and a first translation mechanism in the X direction. Two translation mechanisms 3 , a first translation mechanism 2 in the Y direction, a second translation mechanism 4 in the Y direction, and a deflection mechanism 6 in the Z direction located at the bottom of the loading platform 5 .
[0035] Such as figure 2 As shown, the first translation mechanism 1 in the X direction and the second translation mechanism 3 in the X direction have the same structure, and are connected by the base 1-1 in the X direction formed by a metal frame with rela...
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