Temperature difference type wind speed sensor, preparation method thereof and wind speed detecting method

Abstract

The invention provides a temperature difference type wind speed sensor which comprises the components of a ceramic substrate, a heating element which is configured on the ceramic substrate, at least two sets of temperature sensing elements which are configured on the front surface of the ceramic substrate and are arranged around the heating element in a central symmetry manner, and at least two sets of temperature measuring elements which are configured on the back surface of the ceramic substrate and correspond with the positions of the temperature sensing elements. Furthermore the heating element is configured on the back surface of the ceramic substrate and performs heating through application of DC power. The temperature sensing elements are metal blocks, and the temperature measuring elements are inductance coils. The invention further discloses a preparation method of the temperature difference type wind speed sensor, and a wind speed detecting method based on the temperature difference type wind speed sensor. The temperature difference type wind speed sensor with the structure has advantages of realizing wind speed detection for positive-direction wind, improving sensitivity of the wind speed sensor, reducing power consumption, preventing wire bonding technology and substrate through hole technology, and realizing low cost and easy industrial production.

Description

technical field [0001] The invention provides a heat-temperature difference wind speed sensor and a detection method thereof, belonging to the technical field of micro-electro-mechanical systems (MEMS). Background technique [0002] Wind speed detection is closely related to daily life, and plays a very important role in many fields such as industrial and agricultural production, energy development, transportation and tourism, weather forecast, and the Internet of Things. Because the traditional MEMS wind speed sensor cannot solve the problem of the front lead, most of them work by sensing the wind on the back side. Since the back side directly interacts with the wind field, the temperature difference between the upstream and downstream is greater than the temperature difference between the upstream and downstream of the front side, which leads to the sensitivity of the sensor. Not high, power consumption is too large. [0003] The patent application number 201410325164.1 d...

AI Technical Summary

Problems solved by technology

Although this method achieves wind sensing from the front, it still needs to perforate the substrate, and it also needs to involve bonding wire technology, and there is still a certain complexity in the structure and manufacturing process.

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