Three-dimensional temperature detector and manufacturing method for same

Abstract

The invention provides a three-dimensional temperature detector and a manufacturing method for the same. The three-dimensional temperature detector comprises a substrate, a first dielectric layer positioned on the surface of the substrate and a cavity enclosed by the first dielectric layer, a first layer of thermoelectric pile material structure, a second dielectric layer structure, a second layer of thermoelectric pile material structure and a third dielectric layer structure, wherein a sixth groove and an infrared absorption layer structure filled in the sixth groove are arranged at the top of the cavity; the infrared absorption layer structure is provided with an eighth groove; the first layer of thermoelectric pile material structure is connected with the second layer of thermoelectric pile material structure through a fourth groove. According to the three-dimensional temperature detector and the manufacturing method for the same, the lengths of a thermoelectric pile thermocouple pair and a thermoelectric pile heat-insulating film can be increased to reduce the thermal conductivity, so that the temperature difference of a hot junction and a cold junction is increased, and the sensitivity of the temperature detector is improved; moreover, in a manufacturing process, process stability and device performance can be improved.

Description

technical field

[0001] The present application relates to the field of semiconductor technology, in particular to a three-dimensional temperature detector and a manufacturing method thereof. Background technique

[0002] Temperature detection has always been a hot topic in the sensor industry, among which infrared detection technology is more popular in design, manufacture and users due to its non-contact temperature measurement. As a kind of infrared detector, thermopile temperature sensor has been widely studied for its simple manufacturing process, low cost, convenient use, and no 1 / f noise.

[0003] The main working principle of the thermopile temperature sensor is the Seebeck effect. This effect can be briefly described as: Two materials with different Seebeck coefficients (α1, α2) are connected at one end and open at the other end. If there is a temperature difference between the two ends ΔT=T1-T2, an open circuit potential ΔV will be generated at the open circuit end...

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