Evaporation deposition film mask plate, manufacturing method thereof, electromagnetic evaporation deposition device and evaporation deposition method

Abstract

The invention relates to an evaporation deposition film mask plate, a manufacturing method thereof, an electromagnetic evaporation deposition device and an evaporation deposition method. The problem that in an existing electromagnetic evaporation deposition device, due to the effect of gravity, the middle position of an evaporation deposition film mask plate sags more, an evaporation deposition material is liable to diffract at a gap is solved. The evaporation deposition film mask plate comprises a film mask plate main body and a plurality of openings formed in the film mask plate main body. Each opening serves as an evaporation deposition area, and the other parts of the film mask plate main body except the openings serve as a shielding area. A first groove is formed in the shielding area and filled with a magnetic material, and the magnetism of the magnetic material is stronger than that of a film mask plate main body material. The first groove is formed in the evaporation deposition film mask plate main body and filled with the magnetic material with the stronger magnetism, so that the attracting force of an electromagnetic device in the electromagnetic evaporation deposition device to the evaporation deposition film mask plate can be increased, a gap between the evaporation deposition film mask plate and a base plate to be subjected to evaporation deposition can be reduced, and diffracting of the evaporation deposition material at the gap is avoided.

Description

technical field [0001] The invention relates to the technical field of masks, in particular to an evaporation mask, a manufacturing method thereof, an electromagnetic evaporation device and an evaporation method. Background technique [0002] At present, a relatively mature process is to use an evaporation method to manufacture OLED (Organic Light-Emitting Diode, organic light-emitting diode) display products. In the electromagnetic evaporation process, the evaporation mask is a very important equipment component. As there are more and more large-size OLED display products, as the size of the substrate increases, the size of the evaporation mask will also increase, and the thickness of the main body of the evaporation mask will also increase accordingly. Due to the effect of gravity, There is a lot of sagging in the middle of the evaporation mask, and the gap between the substrate and the evaporation mask becomes larger. During the evaporation process, the evaporation mater...

AI Technical Summary

Problems solved by technology

[0003] To sum up, in the current existing electromagnetic evaporation device, due to the effect of gravity, the middle position of the evaporation mask sags more, and the gap between the substrate and the evaporation mask becomes larger. Plating material is prone to diffraction at gaps

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