A vertical cavity surface emitting laser and its manufacturing method

Abstract

The invention discloses a vertical cavity surface emitting laser, comprising: an active layer, a functional auxiliary layer and a P-type DBR layer stacked, the functional auxiliary layer and the P-type DBR layer form a mesa structure; the P-type DBR layer is provided with a channel ; The mesa structure is divided into multiple sub-mesa structures by the channel; the upper end of each sub-mesa structure is provided with a P-face electrode corresponding to the sub-mesa structure one by one, so that multiple waveguides can be formed by using the channel, so that the carrier distribution and The waveguides are connected to realize the independent control of a single mode output by a single electrode, and the mixed control of a few mode outputs by multiple electrodes. The invention also discloses a manufacturing method of a vertical cavity surface emitting laser, which can directly etch a channel on the mesa structure, realizes a new mode control mode, and since all modes are output on a mesa, it can be directly connected with Fiber-coupled, eliminating the use of multiplexers.

Description

technical field [0001] The invention relates to the field of semiconductor lasers, in particular to a vertical cavity surface emitting laser and a manufacturing method thereof. Background technique [0002] Vertical Cavity Surface Emitting Laser (VCSEL for short) is a new type of semiconductor laser whose laser emission direction is perpendicular to the chip surface. Compared with edge emitting laser (EEL for short), VCSEL has many advantages, including low threshold, good stability, long life, small divergence angle, round spot, high fiber coupling efficiency, high modulation rate, and easy two-dimensional integration Wait. Therefore, VCSEL has been widely used in various high-efficiency and high-speed optical communication networks as the main light source device. [0003] With the development of society, a large number of data communication services have emerged, and these new services have higher requirements for the speed and bandwidth of optical communication network...

AI Technical Summary

Problems solved by technology

However, as the carrier of optical communication, optical fiber has encountered a bottleneck in its development.

Each orthogonal mode in multimode fiber can be regarded as an independent channel, but too many modes will bring serious dispersion effects, which limits the communication performance of multimode fiber and makes it difficult to achieve long-distance transmission

For single-mode fiber, although its dispersion is small and ultra-long-distance transmission can be achieved, its multiplexing for time, frequency, polarization and other physical dimensions is approaching the Shannon limit

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