Applicator cleaning device and coating device
A technology of cleaning device and coating device, which is applied in the direction of surface coating liquid device, spray device, cleaning method and utensils, etc., which can solve the thermal deformation of applicator 106, the influence of coating film quality, and the discharge of slit nozzle Unstable spraying state and other problems, to achieve the effect of stable quality and suppression of deformation
Active Publication Date: 2020-11-17
TORAY ENG CO LTD
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- Claims
- Application Information
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Problems solved by technology
[0006] However, in the conventional applicator cleaning device, there is a problem that the applicator 106 is thermally deformed by the heat generated in the cleaning solution, which affects the quality of the coated film.
Therefore, there is a problem that the discharge state of the slit nozzle 103 becomes unstable, which affects the quality of the coating film formed on the substrate.
Method used
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Embodiment Construction
[0028] Embodiments of the present invention will be described below with reference to the drawings.
[0029] Embodiments of the present invention will be described using the drawings.
[0030] figure 1 is a diagram schematically showing the coating device of the present invention, figure 2 It is a figure schematically showing the applicator 30 cleaning device included in the coating device, image 3 It is a figure which looked at the cleaning apparatus of the applicator 30 from the longitudinal direction.
[0031] Such as Figure 1 ~ Figure 3 As shown, the coating device 1 is a device for forming a coating film of a liquid substance such as a chemical solution or a resist solution (hereinafter referred to as a coating liquid) on a substrate 10. The coating device 1 has a The stage 21 and the coating unit 3 configured to be movable in a specific direction relative to the stage 21 .
[0032] In addition, in the following description, the direction in which the coating uni...
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Provides an applicator cleaning device and a coating device that suppress deformation caused by thermal deformation in the applicator. The coater cleaning device cleans the coater, and the coater sprays the coating liquid from the slit nozzle extending in one direction to form a coating film on the substrate, wherein the coater cleaning device has: a cleaning tank, which It is a shape extending in one direction so as to be able to immerse the slit nozzle of the applicator; the cleaning liquid supply part supplies the cleaning liquid to the cleaning tank; and the vibrator applies vibration waves to the cleaning liquid in the cleaning tank, and the cleaning liquid supplies The cleaning liquid is supplied to the cleaning tank in the longitudinal direction, and the supply amount of the cleaning liquid is set to be more in the central part than the two ends of the cleaning tank in the longitudinal direction. The overflow portion at the end is configured so that the flow of the cleaning liquid in the cleaning tank flows from the central portion in the longitudinal direction toward the overflow portion when the slit nozzle is immersed in the cleaning tank.
Description
technical field [0001] The present invention relates to a coater cleaning device for cleaning a coater that ejects a coating liquid, and a coating device, wherein the coating device has the coater cleaning device. Background technique [0002] In a flat panel display such as a liquid crystal display or a plasma display, a substrate such as a glass substrate coated with a coating liquid such as a resist liquid (referred to as a coated substrate) is used. The coated substrate is formed by a coating device that uniformly coats a coating liquid. The coating device has a stage on which a substrate is placed and a coating unit that discharges a coating liquid to the mounted substrate, and the coating device sprays the coating liquid from the coater of the coating unit while making the substrate By moving relative to the coater, a coating film is formed on the substrate. [0003] In this applicator, a slit nozzle is formed on the substrate-facing surface facing the substrate, and...
Claims
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IPC IPC(8): B05B13/04B05B15/55
CPCB05B15/55B05B13/041B05C21/00B05C5/02B08B3/102
Inventor 堀内展雄
Owner TORAY ENG CO LTD