Shockproof multi-station resistance evaporation platform for resistance evaporator
A technology of preventing evaporation and steric hindrance, which is used in vacuum evaporation plating, ion implantation plating, metal material coating process, etc. problem, to achieve the effect of simple structure, low production cost and long service life
Pending Publication Date: 2017-07-14
CHENGDU CVAC VACUUM TECH CO LTD
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Problems solved by technology
[0004] The purpose of the present invention is to overcome the defect that the existing steam resistance table cannot place multiple targets at the same time, so it cannot continuously heat different targets, and provides a shockproof multi-position resistance steam table for the steam resistance device
Method used
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Embodiment
[0023] like Figures 1 to 3 As shown, the present invention discloses a shockproof multi-position resistance steaming table for a steam resistance device, which mainly consists of an electrode plate 1, an evaporation boat 7 arranged on the electrode plate 1 and electrically connected to the electrode plate 1, and the evaporation boat 7 one by one. Correspondingly arranged and electrically connected with the evaporation boat 7 consists of the electrode ears 3 . Wherein, the electrode disk 1 such as figure 1 As shown, the present invention is provided with six evaporation boats 7 on the electrode plate 1 . At the same time, if figure 1 , 2 As shown, an elastic assembly is provided between the said secondary electrode ear 3 and the electrode disc 1, the elastic assembly is as figure 1 As shown, it includes an insulating pad 2 , a mounting plate 4 , and an elastic member 8 .
[0024] During implementation, the electrode disc 1 of the present invention is preferably realized b...
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The invention discloses a shockproof multi-station resistance evaporation platform for a resistance evaporator. The shockproof multi-station resistance evaporation platform is mainly formed by an electrode plate (1), evaporation boats (7) and auxiliary electrode lugs (3), wherein the evaporation boats (7) are arranged on the electrode plate (1) and electrically connected with the electrode plate (1), and the auxiliary electrode lugs (3) are arranged corresponding to the evaporation boats (7) one to one and electrically connected with the evaporation boats (7). The electrode plate of the shockproof multi-station resistance evaporation platform is provided with the evaporation boats, so multiple targets can be simultaneously disposed on the resistance evaporation platform, and different targets can be heated by converting the position of the electrode plate. The shockproof multi-station resistance evaporation platform well solves the problems that a one-station resistance evaporation plate cannot carry various targets at the same time and cannot heat different targets continuously, thereby effectively relieving the workload of an operator and well improving the working efficiency of the resistance evaporator.
Description
technical field [0001] The invention relates to a steam resistance table for a steam resistance device, in particular to a shockproof multi-position resistance steam table for a steam resistance device. Background technique [0002] The evaporation resistance film is generally heated by the target to make the surface components evaporate in the form of atomic groups or ions, and the atomic groups or ions of the target are deposited on the surface of the substrate. structure - layered growth) forms a thin film. The steam resistance table is a component used to heat the target in the steam resistance device. At present, the steam resistance table is mostly used as a one-stage resistance steam table. This type of steam resistance table can only heat one target material, and different targets When heating the target material, it is necessary to clean the evaporation boat and re-place the target material to be heated, instead of heating different target materials continuously, w...
Claims
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CPCC23C14/26
Inventor 曹德向勇孙力
Owner CHENGDU CVAC VACUUM TECH CO LTD