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Combined trimmer and method of manufacturing the same

A manufacturing method and a dresser technology, applied in the directions of grinding tools and work carriers, can solve the problems of reducing the surface flatness of the grinding unit, and achieve the effect of avoiding deformation

Active Publication Date: 2019-01-22
YTDIAMOND
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The technical problem to be solved by the present invention is to avoid reducing the flatness of the surface of the grinding unit due to thermal stress and high temperature deformation in the high temperature process

Method used

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  • Combined trimmer and method of manufacturing the same
  • Combined trimmer and method of manufacturing the same
  • Combined trimmer and method of manufacturing the same

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Embodiment Construction

[0027] Obviously, many modifications and changes made by those skilled in the art based on the gist of the present invention belong to the protection scope of the present invention.

[0028] Those skilled in the art will understand that unless otherwise stated, the singular forms "a", "an", "said" and "the" used herein may also include plural forms. It should be further understood that the word "comprising" used in this specification refers to the presence of said features, integers, steps, operations, elements and / or components, but does not exclude the presence or addition of one or more other features, integers, Steps, operations, elements, components and / or groups thereof. It will be understood that when an element or component is referred to as being "connected" to another element or component, it can be directly connected to the other element or component or intervening elements or components may also be present. As used herein, the term "and / or" includes any and all co...

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PUM

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Abstract

The invention discloses a combined-type dresser and a manufacturing method thereof. The combined-type dresser comprises a pedestal and at least one grinding unit arranged on the pedestal. The grinding units are provided with through holes penetrating through the corresponding grinding units, and each grinding unit comprises a base disk and a grinding part located on the base disk. The manufacturing method of the combined-type dresser includes the steps that the base disks are assembled onto the pedestal at first, and then the base disks are ground until the surface flatness of the base disks reaches a preset standard; afterwards, the base disks are dismounted from the pedestal for machining, so that the grinding parts are formed on the corresponding base disks, and each grinding part is provided with a grinding surface; and then the base disks with the grinding parts are reassembled and fixed to the pedestal. In this way, a plurality of cutting tips on the grinding surfaces of the combined-type dresser can roughly fall off onto the same horizontal plane.

Description

technical field [0001] The invention relates to a combined dresser and a manufacturing method thereof, and belongs to the technical field of a dresser applied in a chemical mechanical polishing process and a manufacturing method thereof. Background technique [0002] Chemical mechanical polishing is one of the most commonly used methods to planarize the surface of semiconductor wafers. In the chemical mechanical polishing process, a polishing pad is usually used together with a polishing liquid to polish the surface of the semiconductor wafer. In the chemical mechanical polishing process, the polishing pad dresser is used to dress the surface of the polishing pad, remove the waste generated when polishing the wafer, and restore the roughness of the polishing pad to maintain the stability of the polishing quality. [0003] The existing polishing pad dresser has multiple diamond particles on the surface used to contact the polishing pad. If the height difference between the s...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24B37/11B24B37/27
CPCB24B37/11B24B37/27
Inventor 陈盈同
Owner YTDIAMOND