Device and method for measuring divergence angle distribution of electron beam
A measuring device and a technology of divergence angle, which are applied in the field of electron beam parameter measurement to achieve the effect of high adjustment work efficiency
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Embodiment 1
[0043] Such as figure 1 As shown, an electron beam divergence angle distribution measuring device of the present invention includes a sealed vacuum target chamber 2, and a conversion target 4 is installed in the sealed vacuum target chamber 2, and the electron beam 1 passing through the conversion target 4 will be placed behind The electron absorption graphite block 7 at the end absorbs, reduces the impact of the electron beam 1 on the vacuum target chamber and the measurement system, and reduces the radiation level of the measurement environment. The conversion target 4 is installed on a rotating optical bench 17, and also includes a rotating optical bench 17. There is a knob adjustment mechanism 18 for converting the position of the target 4 by the seat 17, and the azimuth of the conversion target 4 is adjusted to form a specific angle with the incident direction of the electron beam 1 through the provided knob adjustment mechanism 18, such as figure 2 The shown conversion ...
Embodiment 2
[0050] Such as figure 1 The principle shown in this embodiment is basically the same as that of Embodiment 1, and the only difference is: 1. image 3 The structure of the conversion target 4 shown is different. In this embodiment, the divergence angle of the electron beam is small, so the Mylar film should be selected. First, the rubber ring 413 is embedded in the ring groove in the target ring seat 415, and then there is no damage and scratches, etc. The defective film 414 is flattened on the surface of the target ring seat 415, and then the target ring pressure ring 411 is slowly pressed on the film, and the balance is maintained during the pressing process so that the film is pressed down evenly and the surface is kept flat. The process of pressing is also the process of stretching and tightening the film. After confirming that the stretching effect of the film meets the requirements, fasten the screw through the opening in the target ring pressure ring 411, which can maint...
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