Nozzle mouth cleaning device and its slit type applicator
A technology for cleaning devices and nozzles, which is applied in the fields of spray lip cleaning devices and slit-type coating devices, which can solve the problems of a large amount of time spent and unqualified cleaning, so as to improve cleaning power, prevent unqualified cleaning, and improve production capacity utilization. Effect
Active Publication Date: 2020-03-17
DMS CO LTD
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- Description
- Claims
- Application Information
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Problems solved by technology
[0006] At this time, the front end of the blade should be in contact with the surface of the nozzle lip in parallel, but in the prior art there is a need to make the front end of the blade contact with the surface of the nozzle lip in parallel. A problem that puts a lot of time and effort into
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[0040] Preferred embodiments of the present invention that specifically achieve the above-mentioned problems to be solved will be described below with reference to the drawings. In describing the present embodiment, the same names and the same symbols are used for the same structures, and additional explanations accordingly are omitted below.
[0041] refer to Figure 1 to Figure 7 , an embodiment of the nozzle lip cleaning device and the slit application device using the cleaning device according to the present invention will be described.
[0042] Such asfigure 1 as well as figure 2 As shown, the slit-type smearing device includes: a workbench 1, a nozzle unit 100, a nozzle moving unit 2, a nozzle lip cleaning device 200, a cleaning device moving unit 4, a cleaning device cleaning unit 5, a barrel unit 3 and an atmosphere. Chamber 6.
[0043] Specifically, a substrate to be coated with a chemical solution is placed on the workbench 1, and the nozzle unit 100 moves on the...
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The present invention provides a nozzle lip cleaning device and a slit-type application device utilizing the nozzle lip cleaning device, wherein the nozzle lip cleaning device includes: a cleaning device main body; and a blade support unit having a blade combined with the cleaning device main body. A first blade support member; a blade unit having a first blade, the rear end of the first blade is combined with the first blade support member, and the front end is in contact with the surface of the nozzle lip to scrape off the sprayed liquid The liquid medicine adheres to the surface of the nozzle lip; the angle adjustment unit has a first angle adjustment part, the first angle adjustment part is arranged on the main body of the cleaning device, and moves the first blade support part while adjusting the the relative position between the front end of the first blade and the surface of the nozzle lip; a support pin unit having a first support pin component, the first support pin component being disposed between the first blade support component and the third between one blade and becomes the center of rotation in the width direction of the first blade, so that when the first blade supporting member moves, the front end of the first blade is in parallel contact with the surface of the nozzle lip.
Description
technical field [0001] The present invention relates to a nozzle lip cleaning device and a slit coating device utilizing the nozzle lip cleaning device, more specifically, a nozzle lip cleaning device and a slit coating device utilizing the nozzle lip cleaning device, The blade used for cleaning the mouth of the nozzle is accurately and quickly arranged on the surface of the mouth of the nozzle, and at the same time, the cleaning force of the mouth of the nozzle can be improved. Background technique [0002] The substrate manufacturing process for flat panel display elements includes a coating process of coating various chemical solutions on the substrate surface, and the coating equipment used in the coating process mainly uses a slit coating device with a slit nozzle (Slit nozzle). [0003] The slit-type application device moves instantaneously from one side of the substrate to the other side while spraying the chemical solution through the slit-type nozzle, and then appli...
Claims
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IPC IPC(8): H01L21/67B08B1/00
CPCH01L21/6715B08B1/165H01L21/302H01L21/02
Inventor 朴镐胤金善勇李忠翰具滋贤
Owner DMS CO LTD