Suspension height measurement system and method for magnetic suspension planar motor rotor
A technology of planar motor and levitation height, applied in the direction of measuring device, electric device, electromagnetic means, etc., can solve the problem of inaccurate measurement of the levitation height of the mover, and achieve the effect of simple method and easy operation
Active Publication Date: 2017-08-08
TSINGHUA UNIV +1
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[0004] The purpose of the present invention is to provide a simple and easy measurement system and method to solve the problem that the heat dissipation holes on the stator of the planar motor interfere with the measurement of the Z-direction eddy current sensor, resulting in inaccurate measurement of the suspension height of the mover. Accurate Measurement of Suspension Height of Motor Vehicle
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[0019] The specific content of the present invention will be further described below in conjunction with the drawings and embodiments.
[0020] In order to eliminate the influence of the heat dissipation hole on the measurement of the Z-direction eddy current sensor, when measuring the floating height of the mover, two adjacent Z-direction eddy current sensors are used to measure each measurement point. The choice of distance can ensure that at least one Z-direction eddy current sensor can measure the accurate levitation height. By judging whether the target area of each Z-direction eddy current sensor overlaps with the heat dissipation hole, the reading of the Z-direction eddy current sensor that does not overlap, that is, the Z-direction eddy current sensor is not interfered by the heat dissipation hole, is selected for the measurement of the floating height of the mover, and the plane can be realized. Accurate calculation of the suspension height of the motor mover.
[0021] ...
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The invention provides a suspension height measurement system and a method for a magnetic suspension planar motor rotor. The system comprises eight Z-direction eddy current sensors, two Y-direction eddy current sensors, a Y-direction grating ruler and an X-direction capacitance grating ruler. The eight Z-direction eddy current sensors are equally divided into four groups, and each group of Z-direction eddy current sensors is used for measuring the rotor suspension height at each position. According to the technical scheme of the method, firstly, the position of each Z-direction eddy current sensor in a fixed coordinate system is determined. Secondly, each of all Z-direction eddy current sensors is horizontally shifted to one repeat unit. Thirdly, the reading of one Z-direction eddy current sensor, wherein a target region does not coincide with a heat dissipation hole during the current servo cycle, is selected out of each group of Z-direction eddy current sensors. Fourthly, signals formed based on the combination of the readings of selected Z-direction eddy current sensors out of four groups of Z-direction eddy current sensors during different servo cycles are subjected to low-pass filtering respectively, so that the suspension height signals of four groups of Z-direction eddy current sensors at the position can be obtained. Finally, the average of the obtained four groups of suspension height signals is taken as the suspension height signal of the rotor. Based on the method, the interference of heat dissipation holes on the suspension height measurement is eliminated, so that the accurate measurement of the rotor suspension height is realized.
Description
Technical field [0001] The invention belongs to the technical field of semiconductor equipment, and relates to a method for measuring the levitation height of a mover of a maglev planar motor. Background technique [0002] Planar motors directly use electromagnetic energy to produce two-dimensional plane motion, which has the characteristics of high precision, high output density, and fast response. Therefore, it has important application prospects in two-dimensional processing fields such as semiconductors and liquid crystal screens. Compared with other planar motors, maglev motors are easier to control and require lower stator surface processing, so they have gradually attracted attention. [0003] In a maglev planar motor, as long as the mover is suspended, no matter whether it is moving or not, the coil of the mover needs to be energized, so more heat is generated. In order to better dissipate heat, some heat dissipation holes are usually processed on the stator of the planar ...
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Login to View More IPC IPC(8): G01B7/02
CPCG01B7/02
Inventor 杨开明成荣朱煜李鑫黄伟才穆海华
Owner TSINGHUA UNIV