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Feeding device, ion source device and feeding method

A technology for feeding devices and raw materials, which is applied to circuits, discharge tubes, electrical components, etc., can solve the problems that the bottle mouth is easily blocked by solid raw materials, and the difficulty of vacuum sealing increases, so as to achieve better flexibility and ensure tightness. Effect

Active Publication Date: 2018-10-23
KINGSTONE SEMICONDUCTOR LIMITED COMPANY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The technical problem to be solved by the present invention is to overcome the difficulty of vacuum sealing caused by the separation of the filling port and the gas outlet of the evaporating bottle for gasifying solid raw materials in the prior art, and the difficulty in sealing the bottle mouth when the evaporating bottle is inverted when the filling port and the gas outlet are combined into one. For defects blocked by solid raw materials, a feeding device, ion source device and feeding method are provided, which are suitable for block solid raw materials and powdery solid raw materials, and are especially suitable for occasions that need to be used upside down

Method used

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  • Feeding device, ion source device and feeding method
  • Feeding device, ion source device and feeding method
  • Feeding device, ion source device and feeding method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0053] refer to Figure 2-Figure 9 , the feeding device described in this embodiment includes a container 1, a hollow screw cap 2 and a hollow rod 3, wherein,

[0054] The container 1 includes a container body 11 and a neck 12 connected to the container body 11. The container body 11 has an accommodating space 111 for holding solid raw materials, and the neck 12 is provided with an external thread 121;

[0055] The hollow screw cap 2 includes a side wall 21, an end face 22 connected to one end of the side wall 21, and a hollow portion defined by the side wall. A first through hole 221 communicating with the hollow portion is provided on the end face 22. The hollow part is used for passing the hollow rod 3 , and the inner wall of the side wall 21 is provided with an internal thread 211 matching the external thread 121 ;

[0056] The hollow rod 3 includes a first rod body 31, a second rod body 32, and a protruding portion 33 between the first rod body 31 and the second rod body...

Embodiment 2

[0064] The basic principle of embodiment 2 is consistent with embodiment 1, and the structure of hollow rod and hollow screw cap is referred to embodiment 1, and difference is:

[0065] refer to Figure 10-Figure 12 , the feeding device also includes a jacket 5, the jacket 5 includes a hollow cylinder 51 and an end 52 connected to one end of the hollow cylinder 51, the end 52 is provided with the hollow cylinder 51 through The second through hole 521,

[0066] The other end of the hollow cylinder 51 is connected to the shoulder 13 of the container body, and the neck 12 passes through the hollow cylinder 51 .

[0067] Wherein, the diameter of the second through hole 521 is larger than the outer diameter of the hollow screw cap 2, and the container and the outer casing are integrally formed.

[0068] The method of using the feeding device described in this embodiment is the same as that in Embodiment 1. When the container is placed upright, the solid material is filled, and th...

Embodiment 3

[0072] refer to Figure 13-Figure 15 , the general structure of the feeding device in this embodiment is the same as in Embodiment 2, and a groove 611 (only a part of the top surface of the vacuum chamber is shown) is provided on the top surface 61 of the vacuum chamber, and the groove 611 is used to place a sealing ring (such as an O-ring), viewed from the direction of the plane where the top surface is located (the radial direction L of the end), the groove 611 is arranged near the outer edge of the end 52, for example, the groove 611 is far from the outer edge of the end 52 2cm. The end portion 52 of the overcoat has a larger area, for example, the outer diameter of the end portion 52 is 50 cm,

[0073] When the gasification temperature of the solid raw material is relatively high, the container main body of the feeding device will be heated to a relatively high temperature by the heating device, and a part of the heat will inevitably be conducted to the jacket. However, ...

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Abstract

The invention discloses a material supplying device, an ion source device and a material supplying method. The material supplying device comprises a container, a hollow rotating cap and a hollow rod. The container comprises a container body and a neck part. The hollow rotating cap comprises a side wall, an end surface and a hollow part. The hollow part is used for penetration by the hollow rod. The hollow rod comprises a hollow first rod body, a hollow second rod body, and a projection between the first rod body and the second rod body. When the hollow rod is inserted into the container, the second rod body of the hollow rod extends out of a first through hole and the hollow rotating cap is screwed on the neck part to tight, the first rod body abuts against the bottom of the container, and one end of the projection abuts against the end surface. Through combined use of the container, the hollow rotating cap and the hollow rod, integration of a material filling port and an air outlet is possible on the condition of reversed use. Furthermore bottle opening blocking caused by a solid material or vacuum chamber pollution caused by solid material entering into the hollow rod in reversed use of the container is prevented.

Description

technical field [0001] The invention relates to a feeding device, an ion source device and a feeding method, in particular to a feeding device, an ion source device and a feeding method that need to be used upside down. Background technique [0002] The ion source of the ion implanter is used to generate plasma and extract the beam. In the ion source using solid raw materials (such as red phosphorus), it is necessary to gasify the solid raw material and then pass it into the vacuum chamber to ionize the gas. Sometimes the solid raw material It is blocky and has a large volume. In this case, the evaporating flask used for gasifying solid raw materials is usually provided with two openings, and a larger opening is used as a filling port through which the solid raw material is filled. into the evaporating flask; the other opening, usually of smaller aperture, is used to pass gas into the vacuum chamber. However, the evaporating flask with this structure is not ideal when the v...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J37/317H01J37/08
Inventor 洪俊华杨勇
Owner KINGSTONE SEMICONDUCTOR LIMITED COMPANY