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Narrow band laser apparatus and method for positioning line narrow module

A laser device and narrow-band technology, which is applied to the parts of gas lasers, lasers, laser parts, etc., can solve the problem of resolution reduction

Inactive Publication Date: 2017-08-29
极光先进雷射株式会社
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The spectral line width in the natural oscillation of the KrF and ArF excimer laser devices is as wide as about 350 to 400 pm. Therefore, the chromatic aberration of the laser light (ultraviolet light) projected on the wafer through the projection lens on the exposure device side is reduced, and resolution rate reduction

Method used

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  • Narrow band laser apparatus and method for positioning line narrow module
  • Narrow band laser apparatus and method for positioning line narrow module
  • Narrow band laser apparatus and method for positioning line narrow module

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Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0054]

[0055] 1. Summary

[0056] 2. Laser device with raster moving device (first embodiment)

[0057] 2.1 Laser chamber

[0058] 2.2 Narrowband module

[0059] 2.3 Output Coupler Mirror

[0060] 2.4 Grating moving device

[0061] 3. Grating device including wavefront adjustment mechanism (second embodiment)

[0062] 4. Specific example of housing moving device (third embodiment)

[0063] 5. Laser device capable of moving housing moving device (fourth embodiment)

[0064] 6. Case moving device including a jack device (fifth embodiment)

[0065] 7. Case moving device including a V-direction shaft (sixth embodiment)

[0066] 8. Case moving device including spring (seventh embodiment)

[0067] 9. Case moving device including integrated rail (eighth embodiment)

[0068] 10. Suspension-type casing moving device (ninth embodiment)

[0069] 11. Laser device having grating moving device and housing moving device (tenth embodiment)

[0070] Hereinafter, embodiments of the...

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PUM

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Abstract

A narrow band laser apparatus may include: a laser chamber; a line narrow module configured to narrow a band width of a laser beam outputted from the laser chamber and return the laser beam to the laser chamber, the line narrow module including a grating; a housing accommodating the line narrow module; three mounts fixed to the housing; and a housing moving device configured to support the housing and the line narrow module by supporting each of the three mounts and move the line narrow module by moving the housing with respect to the laser chamber in a direction substantially perpendicular to a dispersion plane of the grating.

Description

technical field [0001] The present disclosure relates to a narrowband laser device and a method of positioning a narrowband module. Background technique [0002] Along with miniaturization and high integration of semiconductor integrated circuits, improvement in resolution is required in semiconductor exposure apparatuses. Hereinafter, the semiconductor exposure apparatus is simply referred to as “exposure apparatus”. Therefore, shortening of the wavelength of light output from the light source for exposure is progressing. As a light source for exposure, a gas laser device was used instead of a conventional mercury lamp. Currently, a KrF excimer laser device that outputs ultraviolet rays with a wavelength of 248 nm and an ArF excimer laser device that outputs ultraviolet rays with a wavelength of 193 nm are used as gas laser devices for exposure. [0003] As a current exposure technology, liquid immersion exposure is put into practical use in which the gap between the pro...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01S3/137
CPCH01S3/08004H01S3/08009H01S3/105G02B27/0972G02B27/1086H01S3/005H01S3/03H01S3/225H01S3/101
Inventor 渡部义信五十岚美和芦川耕志
Owner 极光先进雷射株式会社