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Prober cleaning block assembly

A technology for cleaning and cleaning boards, applied in the field of contact systems, can solve problems such as speeding up the processing time of the detection machine, and achieve the effects of reducing test time, reducing contact resistance, and improving the pass rate

Inactive Publication Date: 2017-09-01
MICROCHIP TECH INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0011] Also, there is always a need to speed up probing machine processing times (e.g. probe die yield)

Method used

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  • Prober cleaning block assembly
  • Prober cleaning block assembly
  • Prober cleaning block assembly

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0028] refer to Figure 1 to Figure 7 To best understand the preferred embodiment and its advantages, like numerals are used to indicate like and corresponding parts. Wafer probing machines may test the electrical characteristics of one or more chips formed on a wafer. The test is performed by contacting the probe contacts of the wafer prober to each die of the wafer located on the wafer chuck of the wafer prober machine. With this test, the chips are classified as good or defective. The exemplary system described below can be used to clean such probe contacts and the exemplary method described below can be used to install such a system for cleaning probe contacts in a probing machine.

[0029] figure 1 An exemplary embodiment of a cleaning plate 100 is illustrated. The cleaning plate 100 includes three retaining members in the preferred shape of three blind threaded holes 110 , 120 and 130 . The cleaning plate 100 may be substantially rectangular. A holding member 110 ...

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Abstract

The invention relates to a prober cleaning block assembly. A system is provided for cleaning of probe contacts. The system includes a base plate comprising three mounting means for receiving each an adjustable attachment means, and means for connecting the base plate to a probe machine; and a cleaning plate comprising three holding means for receiving the respective adjustable attachment means, and a top area for cleaning probe contacts. A method for mounting in a probe machine such a system for cleaning of probe contacts is provided. The method includes connecting the base plate in the probe machine; connecting the cleaning plate to the base plate with the adjustable attachment means by mounting one of the adjustable attachment means as a reference, and mounting the two other adjustable attachment means for adjusting the level of the cleaning plate; and leveling the cleaning plate with the aid of measuring means for measuring distance held by the probe machine.

Description

[0001] Information about divisional applications [0002] This case is a divisional application. The parent case of this divisional case is an invention patent application with an application date of December 9, 2009, an application number of 200980148831.0, and an invention title of "Detector Cleaning Block Assembly". [0003] Related Application Cross Reference [0004] This application claims the benefit of U.S. Provisional Application No. 61 / 121,012, filed December 9, 2008, entitled "PROBERCLEANING BLOCK ASSEMBLY," which is incorporated in its entirety In this article. technical field [0005] The technical field of the invention relates to the cleaning of probes in wafer probing machines. More particularly, the present invention relates to a system for cleaning the contacts of a probe and a method for installing a cleaning plate for the probe in a probing machine. Background technique [0006] In recent years, the cleaning of probes has received attention, especi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R1/073G01R31/26B08B1/00
CPCB08B1/00G01R1/073G01R3/00G01R31/2601C07B59/008C07C237/22C07K1/13C07K5/06026C07K5/06052C07K5/06069C07K5/06078C07K5/06095C07K5/06104C07K5/06139G01N33/6851Y10T29/49826G01R1/0491G01R1/067G01R1/06733
Inventor 罗伯特·A·里士满
Owner MICROCHIP TECH INC