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Mask plate for vapor deposition of organic materials

A technology of organic materials and masks, which is applied in the field of masks for evaporation of organic materials, can solve the problems of difficult cleaning of attached materials, achieve the effects of improving cleaning effects, prolonging service life, and reducing production costs

Active Publication Date: 2019-05-21
WUHAN TIANMA MICRO ELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, these attached materials are difficult to clean, especially those attached to the gaps in the welding area

Method used

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  • Mask plate for vapor deposition of organic materials
  • Mask plate for vapor deposition of organic materials
  • Mask plate for vapor deposition of organic materials

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Embodiment Construction

[0026] The principles and features of the present application will be further described in detail below in conjunction with the drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain related inventions, rather than to limit the invention. It should also be noted that, for ease of description, only parts related to the invention are shown in the drawings.

[0027] It should be noted that, in the case of no conflict, the embodiments in the present application and the features in the embodiments can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and embodiments.

[0028] See figure 2 , which shows a schematic structural view of an embodiment of the mask plate provided by the present application. The mask plate for organic material evaporation in this embodiment may include a frame and at least one mask fixed on the frame. The fr...

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Abstract

The application discloses a mask plate for vapor deposition of organic materials. The mask plate includes a frame and at least one mask fixed on the frame; the frame forms a closed opening, each mask covers at least part of the opening, and is welded and fixed with the frame; the frame is a hollow structure, and the hollow structure of the frame is set There are heating devices for increasing the temperature of the frame. In this embodiment, the heating device can be used to increase the temperature of the frame when cleaning the mask, so as to accelerate the dissolution of various organic materials attached to the mask and improve the cleaning effect.

Description

technical field [0001] The present application relates to the field of display technology, in particular to a mask plate for evaporation of organic materials. Background technique [0002] At present, in the existing OLED (Organic Light Emitting Diode, Organic Light Emitting Diode) display panel, a vacuum evaporation process is usually used to form various functional layers. In the evaporation process, it is generally necessary to use a mask plate. The function of the mask plate is to vapor-deposit the material to the corresponding position through the hole area, so as to form the corresponding functional layer. [0003] Specifically, such as figure 1 As shown, OLED material to be evaporated is placed in the crucible 11 . In vacuum less than 10 -5 Under the environment of Pa, the temperature of the crucible 11 is gradually raised. When the temperature reaches the sublimation temperature of the OLED material, the OLED material slowly becomes a gaseous sublimation, such a...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/04C23C14/12C23C14/24
CPCC23C14/042C23C14/12C23C14/24
Inventor 杨育青
Owner WUHAN TIANMA MICRO ELECTRONICS CO LTD