Ion beam adjusting device

Abstract

The invention mainly belongs to the technical field of ion beam adjusting device, and specifically relates to an ion beam adjusting device. The ion beam adjusting device comprises an iron core, pole heads, a first coil and a second coil, wherein the iron core comprises an upper iron core block, a lower iron core block, a front iron core block and a rear iron core block; the front ends and the rear ends of the upper iron core block and the lower iron core block are connected with the front iron core block and the rear iron core block respectively; and the inner side faces of the upper iron core block, the lower iron core block, the front iron core block and the rear iron core block are defined together to form a through hole. The ion beam adjusting device also comprises third coils stacked on the front iron core block in sequence in a sleeving manner and fourth coils stacked on the rear iron core block in sequence in the sleeving manner. According to the ion beam adjusting device disclosed by the invention, the cross section shape of a strip-shaped beam can be maintained to be the shape of a straight line when the beam passes through the device, and the uniformity of the beam in the height direction can be adjusted, so that the requirements of beam transmission and injection are met.

Description

technical field [0001] The invention mainly belongs to the technical field of ion beam adjustment devices, and in particular relates to an ion beam adjustment device, which can keep the cross-sectional shape of the ribbon beam in a straight line when the beam passes through, and can adjust the uniformity of the beam in the height direction . Background technique [0002] Common secondary magnets (or ion beam adjustment devices) currently on the market such as figure 1 and figure 2 As shown, it includes an iron core 1' and two coils 2', the iron core 1' includes an upper iron core block 11' and a lower iron core block 12', the front and back of the upper iron core block 11' and the lower iron core block 12' The two ends are respectively connected by the front core block 13' and the rear core block 14', and the upper core block 11', the lower core block 12', the front core block 13' and the rear core block 14' form a connection hole 3', two coils 2' are respectively embedd...

AI Technical Summary

Problems solved by technology

In this way, after the ribbon beam passes through the magnet, due to the unevenness of the dipole magnet in the height direction, the cross-sectional shape of the ribbon beam will change from a straight line to a meniscus, which is not conducive to the later transmission and control of the beam. It will also have a certain adverse effect on the uniformity of the injected sample.

In addition, the magnetic field between the pole heads of the dipole magnet with this structure is not uniform in the height direction, which cannot meet the requirements of beam transmission and injection

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