Differential pressure sensor device and encapsulation method thereof

Abstract

The present invention discloses a differential pressure sensor device and an encapsulation method thereof. The differential pressure sensor device includes a differential pressure sensor body, a differential pressure sensor tube socket, a differential pressure sensor bushing, two pressure sensing diaphragms and a separator; the differential pressure sensor body has two pressure sensing surfaces; the pressure sensing diaphragms are connected with the pressure sensing surfaces; the separator is arranged on a supporting portion of the inner hole operation space of the differential pressure sensor body; the pressure sensing surfaces are machined into 8-wavy groove lined structures; the depth of wavy grooves is increased, so that the stock of a pressure guiding medium in accommodating spaces is increased; a plugging hole is formed in the separator; the plugging hole is corresponding to the limiting portion of the differential pressure sensor tube socket; and when the differential pressure sensor tube socket sinks into the inner hole operation space of the differential pressure sensor body through the separator, the separator is deformed due to the pressing force of the differential pressure sensor tube socket, so that the differential pressure sensor tube socket can be fixed in the inner hole operation space of the differential pressure sensor body, and the gap of the joint of the limiting portion and the supporting portion is sealed.

Description

technical field [0001] The invention relates to a detection tool, in particular to a differential pressure sensor device and a packaging method thereof. Background technique [0002] The sensor is an electronic component, a common tool used to measure the pressure difference of liquid or gas. It has the characteristics of small size, light weight, high precision, high sensitivity and low cost. It has become an indispensable part in the field of MEMS. an electronic component. With the rapid development of microelectronics technology, differential pressure sensors have been widely used as detection systems in various industries such as automobiles and locomotive equipment, thermal power generation, medical and health, chemical industry, petroleum smelting, industrial electronics, and the Internet of Things. For example, automotive electronics Differential pressure sensors used to measure the exhaust pressure difference between the front and rear channels of the automobile eng...

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Problems solved by technology

[0008] Another object of the present invention is to provide a differential pressure sensor device and its packaging method, increase the number of wave-shaped grooves on the traditional pressure-sensitive surface through mechanical processing, and increase the depth of the wave-shaped grooves at the same time, so that the pressure-guiding medium stock in the wave-shaped grooves Compared with the traditional pressure-sensing surface, to ensure that the volume of the pressure-guiding medium in the positive and negative pressure chambers is equal, thereby improving the balance of the pressure-guiding medium inside the differential pressure sensor, and solving the problem of poor pressure-sensing performance of the traditional differential pressure sensor device, to ensure Reliability of Measurement Results of Differential Pressure Sensor Devices

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