Pneumatic precision positioning mechanism with piezoelectric microdisplacement compensation function

Abstract

The invention provides a pneumatic precision positioning mechanism with a piezoelectric microdisplacement compensation function. The neumatic precision positioning mechanism consists of a cylinder, a piezo-ceramic displacement amplification mechanism, a second slider, a first slider, a guide rail 7, a glass ruler 9 of a grating sensor, a first reading head of a grating sensor, a second reading head of the grating sensor, a worktable, a first connecting piece, a second connecting piece, a sixth connecting piece, a fifth connecting piece, a seventh connecting piece and a third connecting piece, wherein the cylinder and the worktable are connected through the first connecting piece and the second connecting piece; the cylinder is connected with the piezo-ceramic displacement amplification mechanism and the first slider through the fourth connecting piece; the fourth connecting piece is connected with the first reading head of the grating sensor through the sixth connecting piece; a displacement output shaft of the piezo-ceramic displacement amplification mechanism is connected with the second slider through the fifth connecting piece; the fifth connecting piece is connected with the second reading head of the grating sensor through the seventh connecting piece; and the guide rail is connected with the worktable through the third connecting piece. According to the pneumatic precision positioning mechanism, microdisplacement output by piezo-ceramic is utilized to make up for output displacement accuracy of the cylinder, so that large-stroke high-precision positioning is realized.

Description

technical field [0001] The invention relates to a pneumatic precision positioning mechanism, in particular to a pneumatic precision positioning mechanism for piezoelectric micro-displacement compensation. Background technique [0002] Due to its low cost, energy saving, fast response, simple component structure, high work efficiency, convenient use and maintenance, high power-to-weight ratio, strong anti-interference, convenient centralized air supply and no pollution, etc., the pneumatic system is widely used in machinery. , transportation, chemical industry, metallurgy, mining, microelectronics, bioengineering, food, textile, medicine and military and other industrial sectors have been widely used. The traditional pneumatic system adopts mechanical positioning and throttle valve speed regulation, which often cannot meet the automatic control requirements of many equipment. However, the electric-pneumatic proportional or servo control system can realize multi-point steples...

AI Technical Summary

Problems solved by technology

[0005] In view of the poor positioning accuracy of the existing pneumatic positioning system that cannot meet the application requirements of precision mechanical engineering, this invention combines the advantages of piezoelectric ceramics and applies it to the pneumatic positioning system to propose a pneumatic precision positioning mechanism based on piezoelectric micro-displacement compensation. Pneumatic precision positioning mechanism for large stroke and high precision positioning

Images