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Torsional and translational micro-electromechanical system magnetic field sensor

A magnetic field sensor and electromagnetic field technology, which is applied in the field of sensors to achieve the effects of easy driving, reliable performance and simple structure

Active Publication Date: 2017-11-07
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

These magnetic field sensors can only measure the magnitude of the magnetic field

Method used

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  • Torsional and translational micro-electromechanical system magnetic field sensor
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  • Torsional and translational micro-electromechanical system magnetic field sensor

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Embodiment Construction

[0016] specific implementation plan

[0017] The technical solutions of the embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0018] like figure 1 As shown, a twist-translation microcomputer electromagnetic field sensor according to an embodiment of the present invention includes a substrate 1 , a bottom electrode layer 2 , a sacrificial layer 3 , a silicon oxide layer 4 and a metal layer 5 arranged sequentially from bottom to top. The sacrificial layer 3 is a hollow structure. The top surface of the silicon oxide layer 4 is provided with a first bonding pad 6, a second bonding pad 7, a third bonding pad 8, a fourth bonding pad 9, a fifth bonding pad 10, a sixth bonding pad 11, and a seventh bonding pad 12. The eighth pad 13, the ninth pad 14, the tenth pad 15, the eleventh pad 16, the twelfth pad 17, the thirteenth pad 18, the fourteenth pad 19, the tenth pad The fifth pad 20 and the sixteenth pad 21 . ...

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Abstract

The present invention discloses a micro-electromechanical system magnetic field sensor used for measuring a magnetic field direction. The micro-electromechanical system magnetic field sensor comprises a substrate, a bottom electrode layer, a sacrificial layer, a silicon oxide layer and a metal layer which are superposed orderly from bottom to top. The middle part of the sacrificial layer is hollow, the middle part of the oxide layer is a torsion plate, and the top surface of the metal layer is equipped with an anchor area. The metal layer is located above the torsion plate, and the first to fourth capacitors are arranged above the torsion plate. The first to fourth capacitor lead wires and a metal wire arranged along the edge of the torsion plate are arranged on the top surface of the torsion plate, the two ends of the metal wire are connected with two pads respectively, the bottom electrode layer is connected with the metal layer, and pads are arranged above the edges of the silicon oxide layer and are connected with the metal layer. The magnetic field sensor is simple in structure, can measure the magnetic field direction and the amplitude.

Description

technical field [0001] The invention belongs to the technical field of sensors, and in particular relates to a torsion translation microcomputer electromagnetic field sensor. Background technique [0002] Magnetic field sensors have a long history. From the invention of the compass to modern traffic navigation, magnetic field sensors have been paid more and more attention. [0003] Magnetic sensors are widely used and have played an important role in the national economy, national defense construction, science and technology, medical and health fields, and have become a major branch of the modern sensor industry. They are playing an increasingly important role in various aspects such as the application and transformation of traditional industries, resource exploration and comprehensive utilization, environmental protection, bioengineering, and intelligent traffic control. At present, magnetic sensors using various physical, chemical and biological effects have been develope...

Claims

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Application Information

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IPC IPC(8): G01R33/02
Inventor 陈洁惠肇宇
Owner SOUTHEAST UNIV