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An Adaptive Inverse Control Method for Nano Servo System

A technology of adaptive control and servo system, applied in the direction of adaptive control, general control system, control/adjustment system, etc., can solve the problems of discrete identification method modeling error, inverse compensation error, and reduce the control accuracy of nanometer servo system, etc. To achieve the effect of improving the control accuracy

Inactive Publication Date: 2020-12-11
BEIHANG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to the influence of factors such as temperature and pressure in the environment, discrete identification methods often introduce modeling errors
Then when the P-I model of discrete identification is used to compensate the hysteresis in the nano-servo system, it will cause inverse compensation errors and reduce the control accuracy of the nano-servo system

Method used

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  • An Adaptive Inverse Control Method for Nano Servo System
  • An Adaptive Inverse Control Method for Nano Servo System
  • An Adaptive Inverse Control Method for Nano Servo System

Examples

Experimental program
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Effect test

Embodiment

[0098]Application of Adaptive Inverse Control Method Based on P-I Hysteresis Modeling in Nano-Servo System Using Piezoelectric Ceramics as Actuators

[0099] In order to verify the effectiveness of the estimation-based P-I modeling method in the present invention, given as figure 2 The nano-servo system shown applies an input multi-frequency voltage signal as

[0100] x=3-1.2cos(48πt)-1.8cos(60πt)V,

[0101] After a voltage amplifier, the signal is transmitted to the piezoelectric actuator. The piezoelectric actuator is a piezoelectric ceramic. The displacement data output by the piezoelectric ceramic is transmitted to the central sample platform of the nano-servo system through the flexible mechanism, and then passed through the flexible mechanism. The laser interferometer measures the displacement data output by the central sample platform, and the displacement data output by the central sample platform is represented by y. At the same time, consider the P-I model shown i...

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Abstract

The invention provides a nanometer servo system adaptive inverse control method. The nanometer servo system adaptive inverse control method comprises steps of obtaining a P-I hysteresis model based on experiment data of the nanometer servo system, identifying parameters in the P-I hysteresis model online on the basis of a gradient adaptive control algorithm, obtaining an estimation P-I hysteresis model, the parameters of which are known, obtaining an adaptive inverse controller based on the estimation P-I hysteresis model and controlling the nanometer servo system based on the adaptive inverse controller. The nanometer servo system adaptive inverse control method further improves control accuracy of the nanometer servo system modeling, has theory significance and an application value.

Description

technical field [0001] The invention relates to the field of automatic control, and more particularly, to an adaptive inverse control method based on P-I hysteresis modeling with asymmetric hysteresis nonlinear characteristics in nano-servo systems. Background technique [0002] With the rapid development of nanotechnology, the continuous updating of nanoscale manipulation mechanisms and sensing devices has been greatly promoted. The design and control of nano-servo systems have increasingly become the core technology of many high-tech industries such as medical equipment, measurement equipment, ultra-precision manufacturing and information storage, as well as interdisciplinary fields. Nano-servo system not only contains nano-scale measurement, preparation and detection, but also one of the most effective carriers for nano-industry applications. field. Carrying out research on the design and control of nano-servo system can promote the continuous progress of aerospace, mic...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G05B13/04
CPCG05B13/042
Inventor 闫鹏张扬名
Owner BEIHANG UNIV