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Nanometer servo system adaptive inverse control method

A technology of adaptive control and servo system, applied in the direction of adaptive control, general control system, control/regulation system, etc., can solve the problems of discrete identification method modeling error, inverse compensation error, reducing the control accuracy of nano-servo system, etc. To achieve the effect of improving the control accuracy

Inactive Publication Date: 2017-11-10
BEIHANG UNIV
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  • Application Information

AI Technical Summary

Problems solved by technology

Due to the influence of factors such as temperature and pressure in the environment, discrete identification methods often introduce modeling errors
Then when the P-I model of discrete identification is used to compensate the hysteresis in the nano-servo system, it will cause inverse compensation errors and reduce the control accuracy of the nano-servo system

Method used

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  • Nanometer servo system adaptive inverse control method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment

[0098]Application of Adaptive Inverse Control Method Based on P-I Hysteresis Modeling in Nano Servo System Using Piezoelectric Ceramics as Actuators

[0099] In order to verify the validity of the P-I modeling method based on estimation in the present invention, give as figure 2 The shown nano servo system applies an input multi-frequency voltage signal as

[0100] x=3-1.2cos(48πt)-1.8cos(60πt)V,

[0101] After a voltage amplifier, the signal is transmitted to the piezoelectric actuator, the piezoelectric actuator is a piezoelectric ceramic, and the displacement data output by the piezoelectric ceramic is transmitted to the central sample platform of the nanometer servo system through a flexible mechanism, and then passed The laser interferometer measures the displacement data output by the central sample platform, and the displacement data output by the central sample platform is represented by y. At the same time, consider the P-I model shown in formula (5), where the val...

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Abstract

The invention provides a nanometer servo system adaptive inverse control method. The nanometer servo system adaptive inverse control method comprises steps of obtaining a P-I hysteresis model based on experiment data of the nanometer servo system, identifying parameters in the P-I hysteresis model online on the basis of a gradient adaptive control algorithm, obtaining an estimation P-I hysteresis model, the parameters of which are known, obtaining an adaptive inverse controller based on the estimation P-I hysteresis model and controlling the nanometer servo system based on the adaptive inverse controller. The nanometer servo system adaptive inverse control method further improves control accuracy of the nanometer servo system modeling, has theory significance and an application value.

Description

technical field [0001] The invention relates to the field of automatic control, more specifically, an adaptive inverse control method based on P-I hysteresis modeling of asymmetric hysteresis nonlinear characteristics in a nanometer servo system. Background technique [0002] With the rapid development of nanotechnology, it has greatly promoted the continuous updating of nanoscale control mechanisms and sensor devices. The design and control of nano servo system has increasingly become the core technology of many high-tech industries and interdisciplinary fields such as medical equipment, measurement equipment, ultra-precision manufacturing and information storage. The nano-servo system not only contains nano-scale measurement, preparation and detection, but also is one of the most effective carriers for nano-industry applications. It is more and more widely used in atomic force microscopes, optical fiber automatic alignment, cell cutting, LCD manufacturing and hard disk dri...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05B13/04
CPCG05B13/042
Inventor 闫鹏张扬名
Owner BEIHANG UNIV